New Calibration Method for Experimental Study of the Nonlinear Behavior of a Bulk Acoustic Wave Resonator Subject to a High-Power Signal

International audienc

Optical and Telecom thin films deposited by laser ablation

International audienc

Synthèse et optimisation d'un filtre à résonateurs BAW pour une application aux fréquences UMTS

International audienc

BAW Pressure Sensor on LiNbO3 Membrane Lapping

In this paper, we have proposed a new concept for pressure and more generally stress sensors exploiting single-crystal based HBAR. After describing the operation principle, the practical feasibility of the sensor has been shown, yielding electrical results allowing a first characterization of such sensor sensitivity. The process flow is generic and allows us to develop different devices such as HBAR or SAW sensors with the freedom of choosing material in function of the design requirements. Although the first reported results can not exploit the high quality resonance of such HBARs, more effort will be performed in the next future to definitely validate the approach and the corresponding stress sensitivity

Large Band Pass BAW Filter for Space Applications

International audienceA resonator using shear waves of lithium niobate is used in this paper to achieve large fractional bandwidth BAW filter. Electromechanical couplings in the 20 - 50 % range are obtained for the shear waves of a thin layer of Lithium Niobate suspended on a silicon substrate. By this way a filter with fractional bandwidth over 20% has been designed for space applications

Filtre BAW à large bande passante en niobate de lithium

Assemblée générale "Interférences d'Ondes", GdR Onde

Large bandpass filter synthesis using shear-wave lithium niobate piezoelectric layers

International audienc