Mechanical-Resonance-Enhanced Thin-Film Magnetoelectric Heterostructures for Magnetometers, Mechanical Antennas, Tunable RF Inductors, and Filters

The strong strain-mediated magnetoelectric (ME) coupling found in thin-film ME heterostructures has attracted an ever-increasing interest and enables realization of a great number of integrated multiferroic devices, such as magnetometers, mechanical antennas, RF tunable inductors and filters. This paper first reviews the thin-film characterization techniques for both piezoelectric and magnetostrictive thin films, which are crucial in determining the strength of the ME coupling. After that, the most recent progress on various integrated multiferroic devices based on thin-film ME heterostructures are presented. In particular, rapid development of thin-film ME magnetometers has been seen over the past few years. These ultra-sensitive magnetometers exhibit extremely low limit of detection (sub-pT/Hz1/2) for low-frequency AC magnetic fields, making them potential candidates for applications of medical diagnostics. Other devices reviewed in this paper include acoustically actuated nanomechanical ME antennas with miniaturized size by 1-2 orders compared to the conventional antenna; integrated RF tunable inductors with a wide operation frequency range; integrated RF tunable bandpass filter with dual H- and E-field tunability. All these integrated multiferroic devices are compact, lightweight, power-efficient, and potentially integrable with current complementary metal oxide semiconductor (CMOS) technology, showing great promise for applications in future biomedical, wireless communication, and reconfigurable electronic systems

An integrated tunable isolator based on NiZn film fabricated by spin-spray plating

An innovative type of tunable isolator with a planar comb-like microstrip transmission line, which generate circular polarization magnetic field, has been realized with polycrystalline NiZn ferrite thick films fabricated by spin-spray plating (SSP) process with thickness of 10μm. The phase compositions, microstructure, magnetic hysteresis loop, and ferromagnetic resonance (FMR) linewidth of NiZn ferrite thick films have been characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), vibrating sample magnetometer (VSM) and electron spin resonance (ESR) spectrometer, respectively. The NiZn ferrite thick films possess 4800Gauss saturation magnetization and 190Oe FMR linewidth measured at X-band. With an in-plane dc magnetic bias perpendicular to the comb-like microstrip transmission line, the transmission direction of left-hand circular polarization (LHCP) and right-hand circular polarization (RHCP) were proved to be opposite. The non-reciprocal ferromagnetic resonance absorption leads to 11.6dB isolation and 5.78dB insertion loss at 17.57GHz with magnetic bias field of 3.5kOe. Furthermore, with external in-plane magnetic fields range from 0.5kOe to 3.5kOe, the central frequency was tuned from 5.63GHz to 17.57GHz. The state-of-the-art tunable isolator with a planar comb-like microstrip transmission line exhibit a great potential to be applied in different microwave components and radar system