46 research outputs found
X-ray absorption spectromicroscopy studies for the development of lithography with a monomolecular resist
Zharnikov M, Shaporenko A, Paul A, Gölzhäuser A, Schow A. X-ray absorption spectromicroscopy studies for the development of lithography with a monomolecular resist. Journal of Physical Chemistry B. 2005;109(11):5168-5174