Special ion beam production by sputtering of metal mixtures and alloys in the PIG ion source

With 5 figs.SIGLEDEGerman

Accel-decel extraction system for PIG sources

To generate an ion beam with higher current at low energy, a triode extraction system operated in accel-decel mode is a possible solution. By applying a negative potential at the second electrode (U_d_e_c) a high extraction field can be achieved. The ions are decelerated between the negative electrode and ground electrode to the desired beam energy. In this article, the effects of extraction field, arc current and ion energy on the extracted ion beam current and it's emittance were investigated. (orig.)Available from TIB Hannover: RA 3692(2002-02) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman