4,742 research outputs found
Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube
In this paper we present the first investigation of a batch method for folding of threedimensional micrometer-sized silicon nitride structures by capillary forces. Silicon nitride tubes have been designed and fabricated using DRIE at the center of the planar origami patterns of the structures. Water is brought to the structures by pumping the liquid through the wafer via those tubes. Isolated micro-structures were successfully folded using this method. The potential of this technique for batch self-assembly is discussed
Metastability and the Casimir Effect in Micromechanical Systems
Electrostatic and Casimir interactions limit the range of positional
stability of electrostatically-actuated or capacitively-coupled mechanical
devices. We investigate this range experimentally for a generic system
consisting of a doubly-clamped Au suspended beam, capacitively-coupled to an
adjacent stationary electrode. The mechanical properties of the beam, both in
the linear and nonlinear regimes, are monitored as the attractive forces are
increased to the point of instability. There "pull-in" occurs, resulting in
permanent adhesion between the electrodes. We investigate, experimentally and
theoretically, the position-dependent lifetimes of the free state (existing
prior to pull-in). We find that the data cannot be accounted for by simple
theory; the discrepancy may be reflective of internal structural instabilities
within the metal electrodes.Comment: RevTex, 4 pages, 4 figure
Unidirectional Invisibility and PT-Symmetry with Graphene
We investigate the reflectionlessness and invisibility properties in the
transverse electric (TE) mode solution of a linear homogeneous optical system
which comprises the -symmetric structures covered by graphene
sheets. We derive analytic expressions, indicate roles of each parameter
governing optical system with graphene and justify that optimal conditions of
these parameters give rise to broadband and wide angle invisibility. Presence
of graphene turns out to shift the invisible wavelength range and to reduce the
required gain amount considerably, based on its chemical potential and
temperature. We substantiate that our results yield broadband reflectionless
and invisible configurations for realistic materials of small refractive
indices, usually around , and of small thickness sizes with graphene
sheets of rather small temperatures and chemical potentials. Finally, we
demonstrate that pure -symmetric graphene yields invisibility at
small temperatures and chemical potentials.Comment: 20 pages, 1 table 17 figure
Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges
Recently, we demonstrated controllable 3D self-folding by means of capillary
forces of silicon-nitride micro-objects made of rigid plates connected to each
other by flexible hinges [1]. In this paper, we introduce platinum electrodes
running from the substrate to the plates over these bendable hinges. The
fabrication yield is as high as (77 +/- 2) % for hinges with a length less than
75 {\mu}m. The yield reduces to (18 +/- 2) % when the length increases above
100 {\mu}m. Most of the failures in conductivity are due to degradation of the
platinum/chromium layer stack during the final plasma cleaning step. The
bi-layer hinges survive the capillary folding process, even for extremely small
bending radii of 5 {\mu}m, nor does the bending have any impact on the
conductivity. Stress in the different layers deforms the hinges, which does not
affect the conductivity. Once assembled, the conductive hinges can withstand a
current density of (1.6 +/- 0.4) A/cm . This introduction of
conductive electrodes to elastocapillary self-folded silicon-based
micro-objects extends the range of their possible applications by allowing an
electronic functionality of the folded parts.Comment: Currently on a peer review process. 13 page
Elastocapillary folding using stop-programmable hinges fabricated by 3D micro-machining
We show elasto-capillary folding of silicon nitride objects with accurate
folding angles between flaps of 70.60.1{\deg} and demonstrate the
feasibility of such accurate micro-assembly with a final folding angle of
90{\deg}. The folding angle is defined by stop-programmable hinges that are
fabricated starting from silicon molds employing accurate three-dimensional
corner lithography. This nano-patterning method exploits the conformal
deposition and the subsequent timed isotropic etching of a thin film in a 3D
shaped silicon template. The technique leaves a residue of the thin film in
sharp concave corners which can be used as an inversion mask in subsequent
steps. Hinges designed to stop the folding at 70.6{\deg} were fabricated
batchwise by machining the V-grooves obtained by KOH etching in (110) silicon
wafers; 90{\deg} stop-programmable hinges were obtained starting from silicon
molds obtained by dry etching on (100) wafers. The presented technique is
applicable to any folding angle and opens a new route towards creating
structures with increased complexity, which will ultimately lead to a novel
method for device fabrication.Comment: Submitted to a peer reviewed journa
Consumer credit in comparative perspective
We review the literature in sociology and related fields on the fast global growth of consumer credit and debt and the possible explanations for this expansion. We describe the ways people interact with the strongly segmented consumer credit system around the world—more specifically, the way they access credit and the way they are held accountable for their debt. We then report on research on two areas in which consumer credit is consequential: its effects on social relations and on physical and mental health. Throughout the article, we point out national variations and discuss explanations for these differences. We conclude with a brief discussion of the future tasks and challenges of comparative research on consumer credit.Accepted manuscrip
Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip
Scanning rates of the atomic force microscope (AFM) could be significantly \ud
increased by integrating the force sensing probe with microelectromechanical systems (MEMS). We present a micromachining method for batch fabrication of in-plane AFM probes that consist of an ultra-sharp silicon nitride tip on a single \ud
crystal silicon cantilever. Our fabrication method is fully compatible with the silicon-on-insulator (SOI) micromachining allowing a straightforward monolithic integration of the AFM probes with high-aspect-ratio monocrystalline silicon MEMS. Scanning probes with a sharp tip having diameter of less then 10 nm are successfully realized and tested in a commercial AFM set-up demonstrating \ud
feasibility and the large innovation potential of this method
Fabrication of three-dimensional microstructures using capillary forces
In this paper we describe the fabrication of threedimensional microstructures by means of capillary forces. Using an origami-like technique, planar structures are folded to produce 3D-objects. To this purpose use is made of capillary interactions and surface tension forces. Capillarity is a particularly effective mechanism since it becomes dominant at small scales (where surface tension forces dominate over bulk forces), the process benefits therefore from miniaturization. Planar microstructures of silicon nitride of various geometries with lateral dimensions of about 100 mm and thickness 1 mm and thin hinges for rotation, have been fabricated. Preliminary experiments in which liquid drops are deposited on these structures show that mechanical bending forces can be overcome and that folding out-of-plane can be realized. Capillary folding is therefore shown to be a very promising technique to fabricate 3D micro- and nanostructures
Broadband and Wide-Angle Invisibility with PT-Symmetric 2D-Weyl Semimetal
Inspired by the magnificent features of two-dimensional (2D) materials which
aroused much of the interest in recent materials science research, we study
PT-symmetric 2D Weyl semimetal (WSM) to reveal the broadband and wide-angle
invisible configurations in a PT-symmetric optical slab system. Desired
unidirectional reflectionlessness and invisibility phenomena is obtained by the
optimal control of system parameters. We unravel the mystery of broadband and
wide-angle invisibility in regular slab materials with finite refractive
indices by means of the plenary expressions. We show that materials whose
refractive indices relatively small (usually around ) give rise to
quite a lot broadband and wide-angle (almost all incidence angles) invisible
configurations. This is not observed with any 2D material other than 2D WSMs.
Our findings suggest a concrete expedience to experimental realizations in this
direction.Comment: 8 pages, 11 figure
- …