Recrystallized parylene as a mask for silicon chemical etching

This paper presents the first use of recrystallized parylene as masking material for silicon chemical etch. Recrystallized parylene was obtained by melting parylene C at 350°C for 2 hours. The masking ability of recrystallized parylene was tested in HNA (hydrofluoric acid, nitric acid and acetic acid) solution of various ratios, KOH (potassium hydroxide) solution and TMAH (tetramethylammonium hydroxide) at different temperatures and concentrations. It is found that interface between parylene and the substrate can be attacked, which results in undercuts. Otherwise, recrystallized parylene exhibited good adhesion to silicon, complete protection of unexposed silicon and silicon etching rates comparable to literature data

Q-enhanced fold-and-bond MEMS inductors

This work presents a novel coil fabrication technology to enhance quality factor (Q factor) of microfabricated inductors for implanted medical wireless sensing and data/power transfer applications. Using parylene as a flexible thin-film device substrate, a post-microfabrication substrate folding-and-bonding method is developed to effectively increase the metal thickness of the surface-micromachined inductors, resulting in their lower self-resistance so their higher quality factor. One-fold-and-bond coils are successfully demonstrated as an example to verify the feasibility of the fabrication technology with measurement results in good agreements with device simulation. Depending on target specifications, multiple substrate folding-and-bonding can be extensively implemented to facilitate further improved electrical characteristics of the coils from single fabrication batch. Such Q-enhanced inductors can be broadly utilized with great potentials in flexible integrated wireless devices/systems for intraocular prostheses and other biomedical implants

The Multi-shadow Analysis of LED Secondary Optics

AbstractDue to these advantages, small size, low heat radiation, long life time, and high luminous efficiency, the light-emitting diodes (LEDs) have been used widely to the varied lighting in recent years. However, the LEDs have the higher intensity of light in central region and the scattering in the surrounding during lighting, so it is necessary to modify the LED projection by the secondary optical lens. The extra secondary optical lens can enhance the light collection efficiency of LED, but it will readily induce the multi-shadow phenomenon during lighting, which has a significant impact on the human vision. In this study, the LED illumination module with/without secondary optical lens, total internal reflected (TIR) lens or reflection mirror cup, can be simulated by the Apilux(R) optical software. The result indicates that the approach can identify the level of multi-shadow images according to the deviations in light intensity, and will be new performance criteria of LEDs for users

The Active And Interactive Thinking Learning Research In Flip Education

In 2014 a total of 183 schools and 40 high schools participating in the experiment, the schools are in the Tablet PC as a learning tool, application-oriented learning and teaching strategies topics flipped learning, so that students in the teacher\u27s guide concept after active exploration program, in peer under the cooperative learning deepen CBC. After the rise of the majority of primary and secondary schools flipped classroom teacher began groping flip-teaching philosophy, the domestic schools have been put into digital teaching become common trend, there is a period of systematic research in schools to promote the use of the Internet and action vehicles, auxiliary in teaching of information technology equipment, emphasizes active learning, enhance learning interaction between teachers and learners understand and factors influencing teaching effectiveness, so with this initiative (active) and interactive (interactive) flip teaching experiment program