The distribution of O and N in the surface region of laser-patterned titanium revealed by atom probe tomography

Direct Laser Interference Lithography (DLIL) has shown to be a promising technique to chemically and physically alter the surface of titanium. In this work, atom probe tomography analysis was performed on DLIL-treated titanium to obtain the chemical composition of the surface in maxima and minima interference positions. The analysis revealed that a multilayer structure consisting of oxide/oxynitride is formed at both positions; however, the chemical composition is altered differently between the two. The observed difference is believed to be due to an uneven heating and temperature distribution, which is demonstrated by thermal simulations