Characterization of silicon nitride thin films deposited by hot-wire CVD at low gas flow rates

We examined the chemical, structural, mechanical and optical properties of amorphous hydrogenatedsilicon nitride thin films deposited by hot-wire chemical vapour deposition using SiH4, NH3and H2gases at total flow rates below 33 sccm. Time of flight secondary ion mass spectroscopy reveal that thefilm surfaces consist of predominantly Si with hydrogenated SixNyOzspecies. Energy dispersive X-rayspectroscopy and X-ray photoelectron spectroscopy corroborate on the N/Si ratio. Electron energy lossspectroscopy discloses that the thickness of the nitrogen rich oxidized interface between the SiNxfilmsand the c-Si substrate decrease with an enhancing NH3flow rate. By varying the NH3flow rate, denseSiNxfilms can be realized with hydrogen content between 16 and 9 at.%, a refractive index between 3.5and 1.9 and optical band gap ranging from 2 to 4.5 eV. The SiNxfilm stress is compressive for N/Si 0.55. Mechanisms relating the HWCVD conditions and the film structure andproperties are proposed.Web of Scienc

The microstructure of deformed commercial copper

Thesis (Ph. D.) -- University of Stellenbosch, 1981.Full text to be digitised and attached to bibliographic record

Elektrondiffraksietegnieke met behulp van die elektronmikroskoop : 'n studie van sekondere defekte in Al-0.5 [percent] Mg.

Skripsie (M. Sc.) -- Universiteit van Stellenbosch, 1972.In title the [percent] is the symbol.Full text to be digitised and attached to bibliographic record

Thermochromic nanocrystalline Au-VO2 composite thin films prepared by radiofrequency inverted cylindrical magnetron sputtering

Highly crystalline Au-VO2 nanocomposite thin films were prepared on Corning glass substrates by reactive radiofrequency inverted cylindrical magnetron sputtering (ICMS). It is a low cost potential coating technology for the production of large area uniform nanocomposite thin films exhibiting plasmonic properties. This paper reports the synthesis and feasibility of reliably reproduced high quality of Au-VO2 by ICMS. Structural, morphological, interfacial analysis and optical properties of synthesized Au-VO2 nanocomposite thin films are reported.The financial support from the African Laser Centre and Nanosciences African Network is gratefully acknowledged