Removal of 10-nm contaminant particles from Si wafers using CO2 bullet particles

Removal of nanometer-sized contaminant particles (CPs) from substrates is essential in successful fabrication of nanoscale devices. The particle beam technique that uses nanometer-sized bullet particles (BPs) moving at supersonic velocity was improved by operating it at room temperature to achieve higher velocity and size uniformity of BPs and was successfully used to remove CPs as small as 10 nm. CO2 BPs were generated by gas-phase nucleation and growth in a supersonic nozzle; appropriate size and velocity of the BPs were obtained by optimizing the nozzle contours and CO2/He mixture fraction. Cleaning efficiency greater than 95% was attained. BP velocity was the most important parameter affecting removal of CPs in the 10-nm size range. Compared to cryogenic Ar or N2 particles, CO2 BPs were more uniform in size and had higher velocity and, therefore, cleaned CPs more effectively

Measuring national capability over big science's multidisciplinarity: A case study of nuclear fusion research

In the era of big science, countries allocate big research and development budgets to large scientific facilities that boost collaboration and research capability. A nuclear fusion device called the "tokamak" is a source of great interest for many countries because it ideally generates sustainable energy expected to solve the energy crisis in the future. Here, to explore the scientific effects of tokamaks, we map a country's research capability in nuclear fusion research with normalized revealed comparative advantage on five topical clusters-material, plasma, device, diagnostics, and simulation-detected through a dynamic topic model. Our approach captures not only the growth of China, India, and the Republic of Korea but also the decline of Canada, Japan, Sweden, and the Netherlands. Time points of their rise and fall are related to tokamak operation, highlighting the importance of large facilities in big science. The gravity model points out that two countries collaborate less in device, diagnostics, and plasma research if they have comparative advantages in different topics. This relation is a unique feature of nuclear fusion compared to other science fields. Our results can be used and extended when building national policies for big science.11Yscopu

Time-series comparison of COVID-19 case fatality rates across 21 countries with adjustment for multiple covariates

Objectives Although it is widely used as a measure for mortality, the case fatality rate (CFR) of coronavirus disease 2019 (COVID-19) can vary over time and fluctuate for many reasons other than viral characteristics. To compare the CFRs of different countries in equal measure, we estimated comparable CFRs after adjusting for multiple covariates and examined the main factors that contributed to variability in the CFRs among 21 countries. Methods For statistical analysis, time-series cross-sectional data were collected from Our World in Data, CoVariants.org, and GISAID. Biweekly CFRs of COVID-19 were estimated by pooled generalized linear squares regression models for the panel data. Covariates included the predominant virus variant, reproduction rate, vaccination, national economic status, hospital beds, diabetes prevalence, and population share of individuals older than age 65. In total, 21 countries were eligible for analysis. Results Adjustment for covariates reduced variation in the CFRs of COVID-19 across countries and over time. Regression results showed that the dominant spread of the Omicron variant, reproduction rate, and vaccination were associated with lower country-level CFRs, whereas age, the extreme poverty rate, and diabetes prevalence were associated with higher country-level CFRs. Conclusion A direct comparison of crude CFRs among countries may be fallacious, especially in a cross-sectional analysis. Our study presents an adjusted comparison of CFRs over time for a more proper comparison. In addition, our findings suggest that comparing CFRs among different countries without considering their context, such as the epidemic phase, medical capacity, surveillance strategy, and socio-demographic traits, should be avoided