CORE
🇺🇦Â
 make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
Filters
2 research outputs found
Characterization of Compositional Heterogeneity in Chemically Amplified Photoresist Polymer Thin Films with Infrared Spectroscopy
Author
Ashwin Rao
Bryan D. Vogt
+6Â more
David L. VanderHart
Eric K. Lin
Karen Turnquest
Shuhui Kang
Vivek M. Prabhu
Wen-li Wu
Publication venue
'American Chemical Society (ACS)'
Publication date
Field of study
No full text
Crossref
Influence of base additives on the reaction-diffusion front of model chemically amplified photoresists
Author
Ashwin Rao
Bryan D. Vogt
+22Â more
Eric K. Lin
Funato
Hinsberg
Hinsberg
Houlihan
Houlihan
Ito
Ito
Jones
Kang
Karen Turnquest
Michaelson
Paniez
Pawloski
Pawloski
Shuhui Kang
Sushil K. Satija
Turing
Vivek M. Prabhu
Vogt
Wallraff
Wen-li Wu
Publication venue
'American Vacuum Society'
Publication date
01/01/2007
Field of study
No full text
Crossref