11 research outputs found

    Lactose aus Molke und andere Abfallkohlenhydrate als Fermentationsrohstoffe Schlussbericht

    No full text
    With 13 figs.TIB: FR 965 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman

    Neue Duennschichtverfahren durch molecular engineering-Reaktorentwicklung Abschlussbericht

    No full text
    There have been no previous works in the field of constructing a universal reactor for R and D and pilot production purposes. There are numerous publications concerned with the different principles of operation of a CVD reactor. It was the goal of the project to be able to supply potential german users with a thin film CVD reactor that fulfills the demands put forward by the task to transfer results from R and D to production. Intensive discussions with all users of the reactor and simulation of the impact of hardware changes to deposition results helped to minimize the time and effort put into construction and building of the system. A number of problems have been solved during the project having impact on the complete range of products of PLASMOS: Mechanical integration of a module to the MESC compatible cluster handler of an integrator, design and establishment of the electrical and data interfaces of the module with the complete system and development of a professional real time software. This project was PLASMOS' first step in the field multichamber processing using single wafer and load lock. The reactor technique necessary for potential users is now available. Applications can be found in all fields of thin film technologies.(orig.)Available from TIB Hannover: F95B1423+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Forschung und Technologie (BMFT), Bonn (Germany)DEGerman
    corecore