A review on hot cathode ionisation gauges with focus on a suitable design for measurement accuracy and stability

project 16NRM05 'Ion gauge'A literature review starting from 1950 is given on the design and geometry of ionisation gauge types with hot cathodes. Considerations on the material of the electrodes and of surface effects are included. The review focuses on the design issues for measurement accuracy, linearity, repeatability, reproducibility, and stability of sensitivity. Also, the attempts to reduce the lower measurement limit are reviewed to some extent.publishersversionpublishe

Evaluation and metrological performance of a novel ionisation vacuum gauge suitable as reference standard

Funding Information: This work has received funding from the EMPIR programme (projects 16NRM05 and 20SIP01) co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation programme and the Portuguese National Funding Agency for Science, Research and Technology in the framework of the project UIDB/FIS/ 00068/2020. Publisher Copyright: © 2023 The Author(s)Recently, a new type of ionization vacuum gauge was introduced, which was proposed as a reference and transfer standard in the range of 10-6 Pa to 10-2 Pa because of its excellent stability and linearity. In contrast to present models of ionisation vacuum gauges, all electrons have a well-defined path length through the ionisation space. This even allows one to predict the sensitivity for a gas species provided that the ionisation cross section of the gas molecules for electrons between 50 eV and 200 eV is known. Following the development of this gauge we investigated its metrological performance in terms of linearity, resolution, repeatability, reproducibility, transport and long-term stability, disturbances by magnetic fields, influence of the surrounding earth potential and so on. The gauge demonstrated excellent metrological properties and is indeed suitable as an accurate reference and transfer standard, but can also provide important economic benefits to manufacturers and users.publishersversionpublishe

Development of a design for an ionisation vacuum gauge suitable as a reference standard

UID/FIS/00068/2019The EURAMET EMPIR project “16NRM05 - Ion gauge” aims to develop an ionisation vacuum gauge suitable as a reference vacuum standard. In such a gauge the electron trajectories and their kinetic energy inside the ionisation volume should be well defined and stable. In the search for a suitable design, a series of simulations on different ionisation gauge concepts that have the potential to meet stringent stability requirements have been carried out. Different software packages were used for this purpose. This paper focuses on the design aspects and the performance of the different ionisation gauge concepts that have been investigated by simulation. Parameters such as ionisation gauge sensitivity, ion collection efficiency and electron transmission efficiency, have been determined as a function of emission current, pressure and electron source alignment.publishersversionpublishe

Wutz Handbuch Vakuumtechnik

Dieses Standardwerk gibt dem Leser umfassend Auskunft über Theorie und Praxis der Vakuumtechnik. Eine große Anzahl von numerischen Beispielen sowie aussagekräftigen Abbildungen erläutert und visualisiert die theoretischen Sachverhalte