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2 research outputs found
Replacing libraries in scatterometry
Author
Hansen Poul Erik
Jensen Soren Alkaersig
Madsen Jonas Skovlund Moller
Nygard Jesper
Publication venue
'The Optical Society'
Publication date
24/12/2018
Field of study
Get PDF
Copenhagen University Research Information System
Scatterometry for optimization of injection molded nanostructures at the fabrication line
Author
Czolkos Ilja
Garnaes Jorgen
+9 more
Hansen Poul Erik
Jensen Soren Alkaersig
Johansson Alicia
Madsen Jonas Skovlund
Nakotte Lars
Nielsen Theodor
Nygard Jesper
Thamdrup Lasse Hojlund
Vogelsang Arne
Publication venue
'Springer Science and Business Media LLC'
Publication date
02/12/2018
Field of study
No full text
Copenhagen University Research Information System