Basic Mechanisms of Al Interaction with the ZnO Surface

Deposition of Al on ZnO is used for a number of electronic and catalytic devices as well as for nanoenergetic materials. The interface structure and chemical composition often control the performance of devices. In this study, in situ infrared spectroscopy, X-ray photoemission spectroscopy, and low energy ion scattering are combined to investigate the initial stage of interface formation between Al and ZnO. We find that (a) the interface is highly inhomogeneous with discontinuous Al patches, leaving ∼10% of the ZnO surface uncovered even after deposition of an equivalent of 11 nm-thick Al film; (b) upon Al deposition, Al reduces ZnO by forming Al₂O₃ and releasing Zn to the surface, and this process continues as more Al is deposited; (c) the reduced surface Zn atoms readily desorb at 150 °C; and (d) at higher temperature (>600 °C) all Al is oxidized as a result of mass transport. Deposition of a thin Al₂O₃ layer on ZnO prior to Al deposition effectively prevents Al penetration and Zn release, requiring higher temperatures to oxidize Al

Digermane Deposition on Si(100) and Ge(100): from Adsorption Mechanism to Epitaxial Growth

Controlled fabrication of nanometer-scale devices such as quantum dots and nanowires requires an understanding of the initial chemisorption mechanisms involved in epitaxial growth. Vapor phase epitaxy can provide controlled deposition when using precursors that are not reactive with the H-terminated surfaces at ambient temperatures. For instance, digermane (Ge₂H₆) has potential as such a precursor for Ge ALE on Si(100) surfaces at moderate temperatures; yet, its adsorption configuration and subsequent decomposition pathways are not well understood. In situ Fourier transform infrared spectroscopy and first principles calculations reveal that Ge₂H₆ chemisorbs through a β-hydride elimination mechanism, forming Ge₂H₅ and H on both Si(100)-(2 × 1) and Ge(100)-(2 × 1) surfaces, instead of the previously proposed Ge–Ge bond breaking mechanism, and subsequently decomposes into an ad-dimer. The resulting coverage of Ge after a saturation exposure is estimated to be about 0.3 monolayers. Interestingly, the decomposition of adsorbed Ge₂H₅ on Si(100) is faster than Si₂H₅ on Ge(100) at 173 K. The desorption temperature of hydrogen on Si(100) is shown to depend on the Ge coverage, falling from 698 K for ∼1/4 ML Ge on Si(100) to 573 K for a nearly full Ge coverage, consistent with H desorption on Ge(100). Furthermore, hydrogen is observed to migrate from Ge to Si, prior to desorption. This property opens the door for selective growth of Ge on patterned H-terminated Si surfaces