Структура і коливні спектри тонких плівок β-Ga2O3

The structure, phase composition and surface morphology of thin films b-Ga2O3, obtained by high-frequency ion-plasma sputtering, after annealing at different atmosphere was investigated. The spectra of IR reflection of system thin film b-Ga2O3 - fused quartz substrate υ-SiO2 in region 400–1600 cm-1 at 295 K were measured. The peaks in the spectrum of films b-Ga2O3, associated with vibration of Ga – O fragments in structural tetrahedral GaO4 and octahedral GaO6 complexes was interpreted.Досліджено структуру, фазовий склад і морфологію поверхні тонких плівок b–Ga2O3, отриманих методом високочастотного іонно-плазмового розпилення, після відпалу у різних атмосферах. Виміряно спектри ІЧ-відбивання системи тонка плівка b–Ga2O3 – підкладка з плавленого кварцу υ–SiO2 в області 400 - 1600 см–1 при Т = 295 К. Проведено інтерпретацію піків у спектрі плівок b–Ga2O3, що пов’язані з коливаннями Ga–O фрагментів у структурних тетраедричних GaO4 та октаедричних GaO6 комплексах

Dispersion properties of (La0.06Ga0.94)2O3:Eu thin films

The dispersion of the refractive index of (La0.06Ga0.94)2O3:Eu thin films obtained by radio-frequency ion-plasma sputtering has been studied. It was found that the films have a polycrystalline structure corresponding to the monoclinic structure of β- Ga2O3. It is shown that the freshly deposited films are characterised by an abnormal dispersion, and after annealing in argon, a normal dispersion of the refractive index is observed. It was found that at normal dispersion, the spectral dependence of the refractive index in the visible region of the spectrum is mainly determined by electronic transitions from the 2p-state oxygen band, which form the upper filled level of the valence band to the bottom of the conduction band formed by hybridised 2p-states of oxygen and 4s-states of gallium. Two single-oscillator approximation models were analysed and compared for the films annealed in argon, and the approximation parameters, dispersion energy, degree of chemical bond ionicity, coordination number, and static refractive index were determined