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    44 research outputs found

    Interference, Reflectance & Transmittance for Thin Films

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    CRPP, Lausanne
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    Infoscience - École polytechnique fédérale de Lausanne

    Introductory overview to: Deposition of amorphous silicon by very-high-frequency plasma-enhanced chemical vapour deposition

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    CRPP, Lausanne
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    Infoscience - École polytechnique fédérale de Lausanne

    Power transfer efficiency to a RF plasma reactor via a transmission line (balanced shielded stripline) of length comparable to the RF wavelength

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    CRPP, Lausanne
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    Infoscience - École polytechnique fédérale de Lausanne

    Plasma modelling and reactor design (Invited)

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    Infoscience - École polytechnique fédérale de Lausanne

    RF measurements on TCA

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    CRPP, Lausanne
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    Infoscience - École polytechnique fédérale de Lausanne

    Reactor design for large area thin film silicon deposition (Invited tutorial)

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    Infoscience - École polytechnique fédérale de Lausanne

    Diagnostics and Simulation for Large Area RF Plasma Deposition Reactors

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    Infoscience - École polytechnique fédérale de Lausanne

    RF antennas as plasma monitors

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    Invited tal
    Infoscience - École polytechnique fédérale de Lausanne

    Einfluss von Plasma-physikalischen und Plasma-chemischen Eigenschaften von VHF Silan-Plasmen auf die Abscheidung von amorphem und mikrokristallinem Silizium

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    CRPP, Lausanne
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    Infoscience - École polytechnique fédérale de Lausanne

    Large-area deposition of amorphous, photovoltaic Silicon

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    CRPP, Lausanne
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    Infoscience - École polytechnique fédérale de Lausanne
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