Multilevel metallization based on Al CVD

科研費報告書収録論文(課題番号:08555073・基盤研究(A)(2)・H8～H10/研究代表者:坪内, 和夫/超LSI多層配線A1CVD装置の開発

Multiple copper vias for integrated circuit metallization

Electromigration can be reduced in a copper-based metallization of an integrated circuit that includes a first copper-containing via that electrically connects an underlying conductive line and an overlying copper-containing line through an intervening insulating layer. Electromigration can be reduced by forming at least a second copper-containing via that electrically connects the underlying conductive line and the overlying copper-containing line through the intervening insulating layer, in parallel with the first copper-containing via. Multi-vias can provide redundancy to reduce early failure statistics. Moreover, since current is distributed among the vias, the electromigration driving force can be reduced and local Joule heating, in voids at the via interface, also may be reduced. Accordingly, even if via voids are formed, the structure may not fail by catastrophic thermal runaway due to Joule heating.Board of Regents, University of Texas Syste

Multiple copper vias for integrated circuit metallization and methods of fabricating same

Electromigration can be reduced in a copper-based metallization of an integrated circuit that includes a first copper-containing via that electrically connects an underlying conductive line and an overlying copper-containing line through an intervening insulating layer. Electromigration can be reduced by forming at least a second copper-containing via that electrically connects the underlying conductive line and the overlying copper-containing line through the intervening insulating layer, in parallel with the first copper-containing via. Multi-vias can provide redundancy to reduce early failure statistics. Moreover, since current is distributed among the vias, the electromigration driving force can be reduced and local Joule heating, in voids at the via interface, also may be reduced. Accordingly, even if via voids are formed, the structure may not fail by catastrophic thermal runaway due to Joule heating.Board of Regents, University of Texas Syste

The eco-driving effect of electric vehicles compared to conventional gasoline vehicles

Eco-driving is attractive to the public, not only users of internal-combustion-engine vehicles (ICEVs) including hybrid electric vehicles (HEVs) but also users of electric vehicles (EVs) have interest in eco-driving. In this context, a quantitative evaluation of eco-driving effect of EVs was conducted using a chassis dynamometer (C/D) with an “eco-driving test mode.” This mode comprised four speed patterns selected from fifty-two real-world driving datasets collected during an eco-driving test-ride event. The four patterns had the same travel distance (5.2 km), but showed varying eco-driving achievement levels. Three ICEVs, one HEV and two EVs were tested using a C/D. Good linear relationships were found between the eco-driving achievement level and electric or fuel consumption rate of all vehicles. The reduction of CO2 emissions was also estimated. The CO2-reduction rates of the four conventional (including hybrid) vehicles were 10.9%–12.6%, while those of two types of EVs were 11.7%–18.4%. These results indicate that the eco-driving tips for conventional vehicles are effective to not only ICEVs and HEVs but also EVs. Furthermore, EVs have a higher potential of eco-driving effect than ICEVs and HEVs if EVs could maintain high energy conversion efficiency at low load range. This study is intended to support the importance of the dissemination of tools like the intelligent speed adaptation (ISA) to obey the regulation speed in real time. In the future, also in the development and dissemination of automated driving systems, the viewpoint of achieving the traveling purpose with less kinetic energy would be important

Human Colorectal Cancer Infrastructure Constructed by the Glycocalyx

Cancer cells can survive and grow via angiogenesis. An alternative but controversial theory is cancer cells may grow via vasculogenic mimicry (VM), in which the cancer cells themselves construct vessel-like channels that are considered a leading cause of drug resistance. The dynamic functions of the glycocalyx (GCX), a meshwork composed of proteoglycans and glycoproteins that surrounds cell membranes, have been observed in endothelial cells within tumors. However, the actual structural shape formed by the GCX in human patients remains unclear. Here, we visualized the three-dimensional (3D) network structure constructed by bulky GCX in human colorectal cancer (CRC) patients using scanning electron microscopy with lanthanum nitrate staining. The network structure extended throughout the cancer cell nest, opening into capillaries, with a tunnel channel that exhibited a net- and spongy-like ultrastructure. The expression of endothelial and cancer-specific GCX-binding lectins was dramatically increased in the interstitial spaces between cancer cells. Even accounting for the presence of artifacts resulting from sample preparation methods, the intercellular tunnels appeared to be coated with the bulky GCX. Further, this 3D network structure was also observed in the tumors of ApcMin/+ mice. In conclusion, the bulky GCX modifies the network structure of CRCs in human and mice