Nanofabrication of Plasmonic Circuits Containing Single Photon Sources

Nanofabrication of photonic components based on dielectric loaded surface plasmon polariton waveguides (DLSPPWs) excited by single nitrogen vacancy (NV) centers in nanodiamonds is demonstrated. DLSPPW circuits are built around NV containing nanodiamonds, which are certified to be single-photon emitters, using electron-beam lithography of hydrogen silsesquioxane (HSQ) resist on silver-coated silicon substrates. A propagation length of 20 ± 5 μm for the NV single-photon emission is measured with DLSPPWs. A 5-fold enhancement in the total decay rate, and 58% coupling efficiency to the DLSPPW mode is achieved, indicating significant mode confinement. Finally, we demonstrate routing of single plasmons with DLSPPW-based directional couplers, revealing the potential of our approach for on-chip realization of quantum-optical networks