15 research outputs found

    Graphene MEMS capacitive microphone: highlight and future perspective

    Get PDF
    MEMS microphone is widely used in the electronic product nowadays because of its tiny size body, low power consumption and performance consistency over time and temperature. This paper highlights on the MEMS capacitive microphone and future perspective. This paper discusses the working principle of capacitive-based MEMS microphone and some of the important performance parameter that must be considered for the MEMS microphone. Recent MEMS microphone technology incorporates graphene as the microphone membrane. Finally, we discuss the future prospect and the possibility for graphene usage as the membrane for MEMS microphone
    corecore