High-quality cobalt thin films by plasma-enhanced atomic layer deposition

High-quality Co films with low resistivity (10 mu Omega cm) were deposited by plasma-enhanced atomic layer deposition (PE-ALD) from metallorganic precursors and NH3 plasma. The deposition characteristics and film properties were investigated. Especially, we compared the results using two cyclopentadienyl Co precursors, CoCp(CO)(2) and CoCp2. While low resistivity Co films were deposited by both precursors, much better self-limiting behavior was observed for CoCp2. Rutherford backscattering and X-ray photoelectron spectroscopy analysis have shown that the impurity contents in PE-ALD Co film were very low. CoSi2 formation by post deposition annealing with Ti capping layer was studied by synchrotron X-ray diffraction. (c) 2006 The Electrochemical Society.open116162sciescopu

Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co

The silicide formation by annealing plasma-enhanced atomic layer deposition (PE-ALD) Co and physical vapor deposition (PVD) Co was comparatively studied. Very pure Co films were deposited by PE-ALD with CoCp2 and NH3 plasma. However, various analyses have shown that amorphous SiNx interlayer was formed between PE-ALD Co and Si due to the NH3 plasma exposure in contrast with PVD Co. Due to the nitride interlayer, CoSi2 was epitaxially grown from PE-ALD Co by rapid thermal annealing through nitride mediated epitaxy. This process scheme is expected to provide a simple route for contact formation in future nanoscale devices. (c) 2007 American Institute of Physics.open112221sciescopu

Atomic Layer Deposition of Ni Thin Films and Application to Area-Selective Deposition

Ni thin films were deposited by atomic layer deposition (ALD) using bis(dimethylamino-2-methyl-2-butoxo)nickel [Ni(dmamb)(2)] as a precursor and NH3 gas as a reactant. The growth characteristics and film properties of ALD Ni were investigated. Low-resistivity films were deposited on Si and SiO2 substrates, producing high-purity Ni films with a small amount of oxygen and negligible amounts of nitrogen and carbon. Additionally, ALD Ni showed excellent conformality in nanoscale via holes. Utilizing this conformality, Ni/Si core/shell nanowires with uniform diameters were fabricated. By combining ALD Ni with octadecyltrichlorosilane (OTS) self-assembled monolayer as a blocking layer, area-selective ALD was conducted for selective deposition of Ni films. When performed on the prepatterned OTS substrate, the Ni films were selectively coated only on OTS-free regions, building up Ni line patterns with 3 mu m width. Electrical measurement results showed that all of the Ni lines were electrically isolated, also indicating the selective Ni deposition. (C) 2010 The Electrochemical Society. [DOI: 10.1149/1.3504196] All rights reserved.ope

Supercritical Fluid Deposition of Conformal SrTiO3 Films with Composition Uniformity in Nanocontact Holes

SrTiO3 with a high dielectric constant is considered a promising capacitor dielectric for dynamic random access memory. Until now, a SrTiO3 deposition with compositional uniformity and perfect conformality inside high-aspect nanoscale holes has been difficult by chemical vapor deposition (CVD) and atomic layer deposition (ALD). In this study, we report a supercritical fluid deposition (SCFD) of SrTiO3. Compared to CVD SrTiO3, the SCFD SrTiO3 showed perfect conformality and compositional uniformity inside nanosize holes. From these results, the SCFD is expected to be a solution for the stoichiometry and conformality issues of the CVD and ALD SrTiO3.open111411sciescopu

Disruptive low-carbon innovations

This perspective article considers the potential for disruptive innovations to transform the market for energy-related goods and services in line with emission reductions required for stringent mitigation. Its rationale is that consumers are a neglected constituency in societal efforts to meet climate policy objectives. First, I review Christensen’s canonical definition of disruptive innovation as low-end products offering novel sources of value to users marginalised or over-supplied by mainstream markets. Second, I apply disruptive innovation concepts to the challenge of climate change mitigation and the necessary contribution of low-carbon innovation. There are both potentials for disruptive low-carbon innovations but also problems in achieving social benefits through the consumption of private goods. Third, I set out a series of criteria for disruptive low-carbon innovations and apply these to identify sets of potential innovations relating to mobility, buildings & cities, food, and energy supply. A wide range of consumer-facing innovations offer goods or services with novel attributes currently valued only in small market niches. Fourth, I report on the findings of two workshops on disruptive low-carbon innovation involving innovators, market intermediaries, policymakers and researchers. Different stakeholders hold sharply contrasting understandings of disruptive low-carbon innovation and its distinctive relevance for energy transformation

Well-aligned Nickel Nanochains Synthesized by a Template-free Route

Highly uniform and well-aligned one-dimensional Ni nanochains with controllable diameters, including 33, 78, and 120 nm, have been synthesized by applying an external magnetic field without any surface modifying agent. The formation can be explained by the interactions of magnetic dipoles in the presence of applied magnetic field. Magnetic measurements demonstrate that the shape anisotropy dominates the magnetic anisotropy. The demagnetization factor, ∆N, is in the range of 0.23–0.36

The potential contribution of disruptive low-carbon innovations to 1.5 °C climate mitigation

This paper investigates the potential for consumer-facing innovations to contribute emission reductions for limiting warming to 1.5 °C. First, we show that global integrated assessment models which characterise transformation pathways consistent with 1.5 °C mitigation are limited in their ability to analyse the emergence of novelty in energy end-use. Second, we introduce concepts of disruptive innovation which can be usefully applied to the challenge of 1.5 °C mitigation. Disruptive low-carbon innovations offer novel value propositions to consumers and can transform markets for energy-related goods and services while reducing emissions. Third, we identify 99 potentially disruptive low-carbon innovations relating to mobility, food, buildings and cities, and energy supply and distribution. Examples at the fringes of current markets include car clubs, mobility-as-a-service, prefabricated high-efficiency retrofits, internet of things, and urban farming. Each of these offers an alternative to mainstream consumer practices. Fourth, we assess the potential emission reductions from subsets of these disruptive low-carbon innovations using two methods: a survey eliciting experts’ perceptions and a quantitative scaling-up of evidence from early-adopting niches to matched segments of the UK population. We conclude that disruptive low-carbon innovations which appeal to consumers can help efforts to limit warming to 1.5 °C