6 research outputs found
Detailed analysis of the influence of an inductively coupled plasma reactive-ion etching process on the hole depth and shape of photonic crystals in InP∕InGaAsP
No full textFabrication of a hard mask for InP based photonic crystals: Increasing the plasma-etch selectivity of poly(methyl methacrylate) versus SiO[sub 2] and SiN[sub x]
No full textDifferential InP-HBT current controlled LC-oscillators with centre frequencies of 43 and 67 GHz
No full text
