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2 research outputs found
Characterization of LER propagation in resists: Underlayer interfaces in ultra-thin resist films
Author
Georege Simi
Publication venue
eScholarship, University of California
Publication date
30/04/2010
Field of study
No full text
Ezid
eScholarship - University of California
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Characterization of LER propagation in resists: Underlayer interfaces in ultra-thin resist films
Author
Flanigan Kyle
Georege Simi
+7Â more
Kennedy Joseph
Krishnamoorthy Ahila
Naulleau Patrick
Rutter Edward
Wallow Thomas
Wu Zeyu
Xie Song-Yuan
Publication venue
Lawrence Berkeley National Laboratory
Publication date
Field of study
No full text
No abstract prepared
UNT Digital Library