483 research outputs found
Method of treating surfaces of substrates with the aid of a plasma and a reactor for carrying out the method
A method for treating substrate surfaces (e.g. etching and deposition) using a plasma. In practice the plasma flows from its source (13) to a treatment chamber (3). The plasma source is first flushed through with a flushing gas and when this has passed the cathodes (6), the reactant gas is fed into the plasma generator. The reactor used in this process is also described
Method of treating surfaces of substrates with the aid of a plasma
A method for treating substrate surfaces (e.g. etching and deposition) using a plasma. In practice the plasma flows from its source (13) to a treatment chamber (3). The plasma source is first flushed through with a flushing gas and when this has passed the cathodes (6), the reactant gas is fed into the plasma generator. The reactor used in this process is also described
Energy and momentum transfer to spray particles in atmospheric Ar-H2 plasma jet
Spatially resolved measurements of the electron d. and temp. in an atm. Ar plasma jet used for plasma spraying were carried out. The electron d. was detd. from Hb broadening. The electron temp. was obtained both from line-to-continuum ratios and from the electron d., assuming local thermodn. equil. population. Also, particle velocities in the axial direction of the plasma jet were measured with a laser doppler anemometer. [on SciFinder (R)
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