Modeling of Magnetoelectric Microresonator Using Numerical Method and Simulated Annealing Algorithm

A comprehensive understanding of the linear/nonlinear dynamic behavior of wireless microresonators is essential for micro-electromechanical systems (MEMS) design optimization. This study investigates the dynamic behaviour of a magnetoelectric (ME) microresonator, using a finite element method (FEM) and machine learning algorithm. First, the linear/nonlinear behaviour of a fabricated thin-film ME microactuator is assessed in both the time domain and frequency spectrum. Next, a data driven system identification (DDSI) procedure and simulated annealing (SA) method are implemented to reconstruct differential equations from measured datasets. The Duffing equation is employed to replicate the dynamic behavior of the ME microactuator. The Duffing coefficients such as mass, stiffness, damping, force amplitude, and excitation frequency are considered as input parameters. Meanwhile, the microactuator displacement is taken as the output parameter, which is measured experimentally via a laser Doppler vibrometer (LDV) device. To determine the optimal range and step size for input parameters, the sensitivity analysis is conducted using Latin hypercube sampling (LHS). The peak index matching (PIM) and correlation coefficient (CC) are considered assessment criteria for the objective function. The vibration measurements reveal that as excitation levels increase, hysteresis variations become more noticeable, which may result in a higher prediction error in the Duffing array model. The verification test indicates that the first bending mode reconstructs reasonably with a prediction accuracy of about 92 percent. This proof-of-concept study demonstrates that the simulated annealing approach is a promising tool for modeling the dynamic behavior of MEMS systems, making it a strong candidate for real-world applications

Frequency Dependency of the Delta-E Effect and the Sensitivity of Delta-E Effect Magnetic Field Sensors

In recent years the delta-E effect has been used for detecting low frequency and low amplitude magnetic fields. Delta-E effect sensors utilize a forced mechanical resonator that is detuned by the delta-E effect upon application of a magnetic field. Typical frequencies of operation are from several kHz to the upper MHz regime. Different models have been used to describe the delta-E effect in those devices, but the frequency dependency has mainly been neglected. With this work we present a simple description of the delta-E effect as a function of the differential magnetic susceptibility χ of the magnetic material. We derive an analytical expression for χ that permits describing the frequency dependency of the delta-E effect of the Young's modulus and the magnetic sensitivity. Calculations are compared with measurements on soft-magnetic (Fe90Co10)78Si12B10 thin films. We show that the frequency of operation can have a strong influence on the delta-E effect and the magnetic sensitivity of delta-E effect sensors. Overall, the delta-E effect reduces with increasing frequency and results in a stiffening of the Young's modulus above the ferromagnetic resonance frequency. The details depend on the Gilbert damping. Whereas for large Gilbert damping the sensitivity continuously decreases with frequency, typical damping values result in an amplification close to the ferromagnetic resonance frequency

In Situ Laser Light Scattering for Temporally and Locally Resolved Studies on Nanoparticle Trapping in a Gas Aggregation Source

Gas phase synthesis of nanoparticles (NPs) via magnetron sputtering in a gas aggregation source (GAS) has become a well-established method since its conceptualization three decades ago. NP formation is commonly described in terms of nucleation, growth, and transport alongside the gas stream. However, the NP formation and transport involve complex non-equilibrium processes, which are still the subject of investigation. The development of in situ investigation techniques such as UV–Vis spectroscopy and small angle X-ray scattering enabled further insights into the dynamic processes inside the GAS and have recently revealed NP trapping at different distances from the magnetron source. The main drawback of these techniques is their limited spatial resolution. To understand the spatio-temporal behavior of NP trapping, an in situ laser light scattering technique is applied in this study. By this approach, silver NPs are made visible inside the GAS with good spatial and temporal resolution. It is found that the argon gas pressure, as well as different gas inlet configurations, have a strong impact on the trapping behavior of NPs inside the GAS. The different gas inlet configurations not only affect the trapping of NPs, but also the size distribution and deposition rate of NPs

Enhancing composition control of alloy nanoparticles from gas aggregation source by in operando optical emission spectroscopy

The use of multicomponent targets allows the gas‐phase synthesis of a large variety of alloy nanoparticles (NPs) via gas aggregation sources. However, the redeposition of sputtered material impacts the composition of alloy NPs, as demonstrated here for the case of AgAu alloy NPs. To enable NPs with tailored Au fractions, in operando control over the composition of the NPs is in high demand. We suggest the use of optical emission spectroscopy as a versatile diagnostic tool to determine and control the composition of the NPs. A strong correlation between operating pressure, intensity ratio of Ag and Au emission lines, and the obtained NP compositions is observed. This allows precise in operando control of alloy NP composition obtained from multicomponent targets

Miniaturized Double-Wing Delta-E Effect Sensors

Magnetoelastic composites are integral elements of sensors and actuators utilizing magnetostriction for their functionality. Their sensitivity typically scales with the saturation magnetostriction and inversely with magnetic anisotropy. However, this makes the devices prone to minuscule residual anisotropic stress from the fabrication process, impairing their performance and reproducibility, hence limiting their suitability for arrays. This study presents a shadow mask deposition technology combined with a free-free magnetoelectric microresonator design intended to minimize residual stress and inhomogeneity in the magnetoelastic layer. Resonators are experimentally and theoretically analyzed regarding local stress anisotropy, magnetic anisotropy, and the {\Delta}E effect in several resonance modes. Further, the sensitivity is analyzed in the example of {\Delta}E-effect sensors. The results demonstrate a device-to-device variation of the resonance frequency < 0.2 % with sensitivities comparable with macroscopic {\Delta}E-effect sensors. The reproducibility is drastically improved over previous magnetoelastic device arrays. This development marks a step forward in the reproducibility and homogeneity of magnetoelastic resonators and contributes to the feasibility of large-scale, integrated sensor arrays.Comment: 26 pages, 13 figure

Enhancing Reliability of Studies on Single Filament Memristive Switching via an Unconventional cAFM Approach

Memristive devices are highly promising for implementing neuromorphic functionalities in future electronic hardware, and direct insights into memristive phenomena on the nanoscale are of fundamental importance to reaching this. Conductive atomic force microscopy (cAFM) has proven to be an essential tool for probing memristive action locally on the nanoscale, but the significance of the acquired data frequently suffers from the nonlocality associated with the thermal drift of the tip in ambient conditions. Furthermore, comparative studies of different configurations of filamentary devices have proven to be difficult, because of an immanent variability of the filament properties between different devices. Herein, these problems are addressed by constraining the memristive action directly at the apex of the probe through functionalization of a cAFM tip with an archetypical memristive stack, which is comprised of Ag/Si3N4. The design of such functionalized cantilevers (entitled here as "memtips") allowed the capture of the long-term intrinsic current response, identifying temporal correlations between switching events, and observing emerging spiking dynamics directly at the nanoscale. Utilization of an identical memtip for measurements on different counter electrodes made it possible to directly compare the impact of different device configurations on the switching behavior of the same filament. Such an analytical approach in ambient conditions will pave the way towards a deeper understanding of filamentary switching phenomena on the nanoscale

Multi-Mode Love-Wave SAW Magnetic-Field Sensors

A surface-acoustic-wave (SAW) magnetic-field sensor utilizing fundamental, first- and second-order Love-wave modes is investigated. A 4.5   μ m SiO2 guiding layer on an ST-cut quartz substrate is coated with a 200 n m (Fe90Co10)78Si12B10 magnetostrictive layer in a delay-line configuration. Love-waves are excited and detected by two interdigital transducers (IDT). The delta-E effect in the magnetostrictive layer causes a phase change with applied magnetic field. A sensitivity of 1250 ° / m T is measured for the fundamental Love mode at 263 M Hz . For the first-order Love mode a value of 45 ° / m T is obtained at 352 M Hz . This result is compared to finite-element-method (FEM) simulations using one-dimensional (1D) and two-and-a-half-dimensional (2.5 D) models. The FEM simulations confirm the large drop in sensitivity as the first-order mode is close to cut-off. For multi-mode operation, we identify as a suitable geometry a guiding layer to wavelength ratio of h GL / λ ≈ 1.5 for an IDT pitch of p = 12   μ m . For this layer configuration, the first three modes are sufficiently far away from cut-off and show good sensitivity

Nanoscale Synergetic Effects on Ag-TiO2 Hybrid Substrate for Photoinduced Enhanced Raman Spectroscopy (PIERS) with Ultra-Sensitivity and Reusability

Here, a 4N-in-1 hybrid substrate concept (nanocolumnar structures, nanocrack network, nanoscale mixed oxide phases, and nanometallic structures) for ultra-sensitive and reliable photo-induced-enhanced Raman spectroscopy (PIERS), is proposed. The use of the 4N-in-1 hybrid substrate leads to an ≈50-fold enhancement over the normal surface-enhanced Raman spectroscopy, which is recorded as the highest PIERS enhancement to date. In addition to an improved Raman signal, the 4N-in-1 hybrid substrate provides a high detection sensitivity which may be attributed to the activation possibility at extremely low UV irradiation dosage and prolonged relaxation time (long measurement time). Moreover, the 4N-in-1 hybrid substrate exhibits a superior photocatalytic degradation performance of analytes, allowing its reuse at least 18 times without any loss of PIERS activity. The use of the 4N-in-1 concept can be adapted to biomedicine, forensic, and security fields easily

Magnetoelastic Coupling and Delta-E Effect in Magnetoelectric Torsion Mode Resonators

Magnetoelectric resonators have been studied for the detection of small amplitude and low frequency magnetic fields via the delta-E effect, mainly in fundamental bending or bulk resonance modes. Here, we present an experimental and theoretical investigation of magnetoelectric thin-film cantilevers that can be operated in bending modes (BMs) and torsion modes (TMs) as a magnetic field sensor. A magnetoelastic macrospin model is combined with an electromechanical finite element model and a general description of the delta-E effect of all stiffness tensor components Cij is derived. Simulations confirm quantitatively that the delta-E effect of the C66 component has the promising potential of significantly increasing the magnetic sensitivity and the maximum normalized frequency change Δfr. However, the electrical excitation of TMs remains challenging and is found to significantly diminish the gain in sensitivity. Experiments reveal the dependency of the sensitivity and Δfr of TMs on the mode number, which differs fundamentally from BMs and is well explained by our model. Because the contribution of C11 to the TMs increases with the mode number, the first-order TM yields the highest magnetic sensitivity. Overall, general insights are gained for the design of high-sensitivity delta-E effect sensors, as well as for frequency tunable devices based on the delta-E effect