3 research outputs found
4-Nitrobenzene Grafted in Porous Silicon: Application to Optical Lithography
In this work, we report a method to process porous silicon to improve
its chemical resistance to alkaline solution attacks based on the
functionalization of the pore surface by the electrochemical reduction
of 4-nitrobenzendiazonium salt. This method provides porous silicon with
strong resistance to the etching solutions used in optical lithography
and allows the fabrication of tailored metallic contacts on its surface.
The samples were studied by chemical, electrochemical, and morphological
methods. We demonstrate that the grafted samples show a resistance to
harsh alkaline solution more than three orders of magnitude larger than
that of pristine porous silicon, being mostly unmodified after about 40
min. The samples maintained open pores after the grafting, making them
suitable for further treatments like filling by polymers. Optical
lithography was performed on the functionalized samples, and
electrochemical characterization results are shown.In this work, we report a method to process porous silicon to improve
its chemical resistance to alkaline solution attacks based on the
functionalization of the pore surface by the electrochemical reduction
of 4-nitrobenzendiazonium salt. This method provides porous silicon with
strong resistance to the etching solutions used in optical lithography
and allows the fabrication of tailored metallic contacts on its surface.
The samples were studied by chemical, electrochemical, and morphological
methods. We demonstrate that the grafted samples show a resistance to
harsh alkaline solution more than three orders of magnitude larger than
that of pristine porous silicon, being mostly unmodified after about 40
min. The samples maintained open pores after the grafting, making them
suitable for further treatments like filling by polymers. Optical
lithography was performed on the functionalized samples, and
electrochemical characterization results are shown