Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors

Ongoing endurance testing of Ru-capped multilayer mirrors (MLMs) at the NIST synchrotron facility has revealed that the damage resulting from EUV irradiation does not always depend on the exposure conditions in an intuitive way. Previous exposures of Ru-capped MLMs to EUV radiation in the presence of water vapor demonstrated that the mirror damage rate actually decreases with increasing water pressure. We will present results of recent exposures showing that the reduction in damage for partial pressures of water up to 5 x 10{sup -6} Torr is not the result of a spatially uniform decrease in damage across the Gaussian intensity distribution of the incident EUV beam. Instead we observe a drop in the damage rate in the center of the exposure spot where the intensity is greatest, while the reflectivity loss in the wings of the intensity distribution appears to be independent of water partial pressure. (See Fig. 1.) We will discuss how the overall damage rate and spatial profile can be influenced by admixtures of carbon-containing species (e.g., CO, CO{sub 2}, C{sub 6}H{sub 6}) at partial pressures one-to-two orders of magnitude lower than the water vapor partial pressure. An investigation is underway to find the cause of the non-Gaussian damage profile. Preliminary results and hypotheses will be discussed. In addition to high-resolution reflectometry of the EUV-exposure sites, the results of surface analysis such as XPS will be presented. We will also discuss how the bandwidth and time structure of incident EUV radiation may affect the rate of reflectivity degradation. Although the observations presented here are based on exposures of Ru-capped MLMs, unless novel capping layers are similarly characterized, direct application of accelerated testing results could significantly overestimate mirror lifetime in the production environment

EUV testing of multilayer mirrors: critical issues

Recently, while performing extensive EUV irradiation endurance testing on Ru-capped multilayer mirrors in the presence of elevated partial pressures of water and hydrocarbons, NIST has observed that the amount of EUV-induced damage actually decreases with increasing levels of water vapor above {approx} 5 x 10{sup -7} Torr. It is thought that the admitted water vapor may interact with otherwise stable, condensed carbonaceous species in an UHV vacuum system to increase the background levels of simple gaseous carbon-containing molecules. Some support for this hypothesis was demonstrated by observing the mitigating effect of very small levels of simple hydrocarbons with the intentional introduction of methyl alcohol in addition to the water vapor. It was found that the damage rate decreased by at least an order of magnitude when the partial pressure of methyl alcohol was just one percent of the water partial pressure. These observations indicate that the hydrocarbon components of the vacuum environment under actual testing conditions must be characterized and controlled to 10{sup -11} Torr or better in order to quantify the damage caused by high levels of water vapor. The possible effects of exposure beam size and out-of-band radiation on mirror lifetime testing will also be discussed

Maximizing Efficiency in Two-step Solar-thermochemical Fuel Production

AbstractWidespread solar fuel production depends on its economic viability, largely driven by the solar-to-fuel conversion efficiency. Herein, the material and energy requirements in two-step solar-thermochemical cyclesare considered.The need for advanced redox active materials is demonstrated, by considering the oxide mass flow requirements at a large scale. Two approaches are also identified for maximizing the efficiency: optimizing reaction temperatures, and minimizing the pressure in the thermal reduction step by staged thermal reduction. The results show that each approach individually, and especially the two in conjunction, result in significant efficiency gains

First-principles studies on oxygen-induced faceting of Ir(210)

Density functional theory calculations were performed to obtain an atomistic understanding of facet formation on Ir(210). We determined geometries and energetics of clean and oxygen-covered surfaces of planar Ir(210) as well as Ir(311) and two types of Ir(110) surfaces, which are involved in faceting by forming three-sided nanopyramids. Using the energies together with the ab initio atomistic thermodynamics approach, we studied the stability of substrate and facets in the presence of an oxygen environment. Our results show that facets are stable over the entire temperature range at which oxygen is adsorbed on the surface at coverages: 0.45 physical ML, supporting the picture of a thermodynamic driving force. We also investigated the dependence of the phase diagram on the choice of the exchange-correlation functional and obtained qualitatively the same behavior. Finally, this work helps to better understand reactivity and selectivity of 0-covered planar and faceted Ir surfaces in catalysis

Oxygen-Induced Thermal Faceting of Pd Nanosized Crystals

The oxygen-induced faceting of [111] and [100] oriented Pd nanosized crystals (“tips”) was studied by field ion microscopy (FIM). Annealing at temperatures of 500 K in the presence of submonolayer amounts of oxygen caused major reconstruction to occur. Regions of the {100} plane broke up into small {100}, {112}, and {012} facets. In addition, only {111} and significantly enlarged {011} facets occurred at the surface of the reconstructed Pd crystal. The faceting behavior is in accordance with recently calculated equilibrium shapes of Pd crystals in the presence of small amounts of adsorbed oxygen.info:eu-repo/semantics/publishe