1 research outputs found
Nondestructive Measurement of the Evolution of Layer-Specific Mechanical Properties in Sub-10 nm Bilayer Films
We
use short wavelength extreme ultraviolet light to independently measure
the mechanical properties of disparate layers within a bilayer film
for the first time, with single-monolayer sensitivity. We show that
in Ni/Ta nanostructured systems, while their density ratio is not
meaningfully changed from that expected in bulk, their elastic properties
are significantly modified, where nickel softens while tantalum stiffens,
relative to their bulk counterparts. In particular, the presence or
absence of the Ta capping layer influences the mechanical properties
of the Ni film. This nondestructive nanomechanical measurement technique
represents the first approach to date able to distinguish the properties
of composite materials well below 100 nm in thickness. This capability
is critical for understanding and optimizing the strength, flexibility
and reliability of materials in a host of nanostructured electronic,
photovoltaic, and thermoelectric devices