Production Of Spectrally Narrow Soft-X-Ray Radiation Through The Use Of Broadband Laser-Produced Plasma Sources And Multilayer-Coated Reflecting Optics

We describe a special filter design that produces spectrally narrow soft-x-ray radiation by using a broadband laser-produced plasma source and multilayer-coated reflecting optics. Calculations for the design were carried out at several laser-produced plasma-source temperatures and various multilayer-mirror combinations with and without a soft-x-ray filter. We determined that the best arrangement for a laser-produced plasma source consists of two multilayer mirrors and one soft-x-ray filter for each temperature investigated. © 1995 Optical Society of America