2 research outputs found
KvantitatĂv Makyoh-topográfia = Quantitative Makyoh topography
A korszerű fĂ©lvezetĹ‘-technolĂłgiában alapvetĹ‘ fontosságĂş a szeletek felĂĽleti morfolĂłgiájának, az ideális sĂkjellegtĹ‘l valĂł eltĂ©rĂ©sĂ©nek a minĹ‘sĂtĂ©se. A korszerű nagy átmĂ©rĹ‘jű szeletek megjelenĂ©sĂ©vel a sĂkjelleg problĂ©mája Ă©s Ăgy a megfelelĹ‘ minĹ‘sĂtĂ©si eljárás szĂĽksĂ©gessĂ©ge fokozottabban jelentkezik. A jelen pályázat tĂ©mája egy, a Távol-KeletrĹ‘l származĂł Ĺ‘si, "mágikus" tulajdonságĂş tĂĽkör elvĂ©n alapulĂł optikai vizsgálati mĂłdszer, a Makyoh-topográfia alkalmassá tĂ©tele igĂ©nyes metrolĂłgiai cĂ©lokra. A kutatás során Ăşj koncepciĂłjĂş, nagy mĂ©retű minták vizsgálatára alkalmas mĂ©rĂ©si összeállĂtásokat valĂłsĂtottunk meg. Tanulmányoztuk a felĂĽleti domborzat visszanyerĂ©sĂ©re szolgálĂł eljárások Ă©rzĂ©kenysĂ©gĂ©t Ă©s pontosságát, valamint a lekĂ©pezĂ©s alapvetĹ‘ tulajdonságait. A kidolgozott mĂ©rĂ©si eljárást számos fĂ©lvezetĹ‘-technolĂłgiai Ă©s egyĂ©b kutatásban alkalmaztuk. LĂ©pĂ©seket tettĂĽnk a mĂ©rĂ©si eljárás gazdasági hasznosĂtása Ă©rdekĂ©ben. | The assessment of the surface morphology and flatness of the wafers is a key issue in modern semiconductor technology. The need for a proper flatness characterisation method became even more important with the advent of today's large-diameter wafers. The aim of the present project is to make Makyoh topography, an optical characterisation tool based on an ancient 'magic' mirror of Far-East origin suitable for advanced metrological purposes. During our research, we have constructed novel measurement set-ups suitable for the study of large-diameter samples. We have studied the sensivity and accuracy of the numerical methods for the reconstruction of the surface topography and investigated the basic characteristics of the imaging mechanism. The developed methods have been applied in semicondutor technolgy research as well as in other areas. We have taken steps forward the industrial exploitation
MEASUREMENT OF YARN DIAMETER AND TWIST ANGLE WITH IMAGE PROCESSING SYSTEM
A special image processing system was developed by the Department of Polymer Engineer-
ing and Textile Technology TU Budapest and the KFKI Research Institute for Materials
Science Budapest supported by OTKA Fund of Hungary.
The system is suitable for measuring the diameter of fibres and yarns. The hardware
system based on a Projectina Projector Microscope and a CCD camera connected with
a image aquisition card. In addition to the testing of fibres and yarns the menu-driven
software frame provides also general image processing services and possibilities for special
statistical evaluations.
To demonstrate the applicability of the system some kinds of yarn were tested