2 research outputs found
Supplement 1: Tabletop nanometer extreme ultraviolet imaging in an extended reflection mode using coherent Fresnel ptychography
Originally published in Optica on 22 July 2014 (optica-1-1-39
Quantitative Chemically Specific Coherent Diffractive Imaging of Reactions at Buried Interfaces with Few Nanometer Precision
We
demonstrate quantitative, chemically specific imaging of buried nanostructures,
including oxidation and diffusion reactions at buried interfaces,
using nondestructive tabletop extreme ultraviolet (EUV) coherent diffractive
imaging (CDI). Copper nanostructures inlaid in SiO<sub>2</sub> are
coated with 100 nm of aluminum, which is opaque to visible light and
thick enough that neither visible microscopy nor atomic force microscopy
can image the buried interface. Short wavelength high harmonic beams
can penetrate the aluminum layer, yielding high-contrast images of
the buried structures. Quantitative analysis shows that the reflected
EUV light is extremely sensitive to the formation of multiple oxide
layers, as well as interdiffusion of materials occurring at the metal–metal
and metal–insulator boundaries deep within the nanostructure
with few nanometers precision