71 research outputs found

    Ferroelectric microsensors and microactuators

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    Nanosystems - The Next MEMS Revolution

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    MEMS technology and applications

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    BioMEMS applications in medicine

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    MEMS technology for biomedical applications

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    RF MEMS integration present & future trends

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    Schottky barrier photodiodes in Hg<inf>1-x</inf>Cd<inf>x</inf>Te

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