Study on the influence of the magnetron power supply on the properties of the silicon nitride films

Silicon nitride (Si3N4) films were deposited by magnetron sputtering of silicon target in (Ar+N2) atmosphere with refractive index 1.95 - 2.05. The results of Fourier transform infrared (FTIR) spectrophotometry showed Si-N bonds in the thin films with concentration 2.41·1023 - 3.48·1023 cm-3. Dependences of deposition rate, optical characteristics and surface morphology on rate of N2 flow and properties of magnetron power supply

Magnetron sputtering in rigid optical solar reflectors production

Magnetron sputtering was applied to meet the growing need for glass optical solar reflectors. This plasma method provided more uniform deposition of the silver based coating on glass substrates resulted in decrease of defective reflectors fraction down to 5%. For instance, such parameter of resistive evaporation was of 30%. Silver film adhesion to glass substrate was enhanced with indium tin oxide sublayer. Sunlight absorption coefficient of these rigid reflectors was 0.081-0.083

Oxidation kinetics of Cr-coated zirconium alloy: Effect of coating thickness and microstructure

Cr coatings with the thickness of 4.5–9.0 μm and dense/columnar microstructure were deposited onto Zr alloy by cooled or hot target magnetron sputtering. Steam oxidation tests were performed under temperature ramp from 500 to 1200 °C and isothermal treatment at 900−1200 °C for 10−30 min. The measurements of mass gain showed different oxidation kinetics depending on microstructure and thickness of the as-deposited Cr coatings. The dense microstructure is favorable to prevent alloy oxidation as long as the Cr layer is intact. The higher activation energy of 202 kJ/mol is observed for the dense 4.5 μm-thick Cr coating while thicker columnar coatings have 177−183 kJ/mol. The time of transition from protective to non-protective behavior increases with coating thickness. It was shown that the 9 μm-thick Cr coating with columnar microstructure better protects the zirconium alloy from oxidation at 1200 °C for 10 min in comparison with thinner coatings. The fast interdiffusion of Cr and Zr at coating/alloy interface significantly affects the oxidation kinetics of Cr-coated zirconium alloy at temperatures above 1100 °C and long oxidation time

Antibacterial PLGA and PCL membranes, modified by magnetron sputtering method of copper target

Abstract The paper discusses barrier membranes which were formed from poly(lactide-co-glycolide) and polycaprolactone by electrospinning method. Then, plasma modification of membranes was carried out by magnetron sputtering of copper target in argon atmosphere. The morphology, elemental composition, mechanical and antibacterial properties of the obtained samples were investigated. Modification with copper in the magnetron discharge plasma allows maintaining the original characteristics of pristine polymeric samples and imparting antibacterial properties to them.</jats:p

Titanium Carbide Coating for Hafnium Hydride Neutron Control Rods: In Situ X-ray Diffraction Study

This article considers the possibility of using a magnetron-deposited coating for the protection of hafnium hydrides at high temperatures as a material for neutron control rods. We describe the role of TiC coating in the high-temperature behavior of hafnium hydrides in a vacuum. A 1 &micro;m thick TiC coating was deposited through magnetron sputtering on the outer surface of disk HfHx samples, and then in situ X-ray diffraction (XRD) measurements of both the uncoated and TiC-coated HfHx samples were performed using synchrotron radiation (at a wavelength of 1.64 &Aring;) during linear heating, the isothermal stage (700 and 900 &deg;C), and cooling to room temperature. Quadrupole mass spectrometry was used to identify the hydrogen release from the uncoated and TiC-coated hafnium hydride samples during their heating. We found the decomposition of the HfH1.7 phase to HfH1.5 and Hf and following hafnium oxidation after the significant decrease in hydrogen flow in the uncoated HfHx samples. The TiC coating can be used as a protective layer for HfHx under certain conditions (up to 700 &deg;C); however, the fast hydrogen release can occur in the case of a coating failure. This study shows the temperature range for the possible application of TiC coatings for the protection of hafnium hydride from hydrogen release

Modes development of PLGA scaffolds modification by magnetron co-sputtering of Cu and Ti targets

Abstract Bioresorbable scaffolds from poly(lactide-co-glycolide) (PLGA) were formed by electrospinning. Then, plasma modification of PLGA scaffolds was carried out by magnetron co-sputtering of copper and titanium targets in Ar. The surface morphology, elemental composition and mechanical properties of the obtained samples were investigated. The modes of plasma modification were selected that could preserve the macrostructure, morphology and mechanical properties of PLGA scaffolds.</jats:p