Micro and nano-patterning of single-crystal diamond by swift heavy ion irradiation

© 2016 Elsevier B.V.This paper presents experimental data and analysis of the structural damage caused by swift-heavy ion irradiation of single-crystal diamond. The patterned buried structural damage is shown to generate, via swelling, a mirror-pattern on the sample surface, which remains largely damage-free. While extensive results are available for light ion implantations, this effect is reported here for the first time in the heavy ion regime, where a completely different range of input parameters (in terms of ion species, energy, stopping power, etc.) is available for customized irradiation. The chosen ion species are Au and Br, in the energy range 10–40 MeV. The observed patterns, as characterized by profilometry and atomic force microscopy, are reported in a series of model experiments, which show swelling patterns ranging from a few nm to above 200 nm. Moreover, a systematic phenomenological modeling is presented, in which surface swelling measurements are correlated to buried crystal damage. A comparison is made with data for light ion implantations, showing good compatibility with the proposed models. The modeling presented in this work can be useful for the design and realization of micropatterned surfaces in single crystal diamond, allowing generating highly customized structures by combining appropriately chosen irradiation parameters and masks.GG acknowledges support from the ALBA synchrotron, W. Schildkamp for inspiring discussions on the behaviour of diamond and J. Ferrer for his help in experiment preparation. GG, MD-H, VT-M, OP-R and JO acknowledge the projects MAT-2011-28379-C03-02 of the Spanish Ministry of Economy and Competitiveness, TECHNOFUSION(II)CM (S2013/MAE2745) of the Community of Madrid, and Moncloa Campus of International Excellence (UCM-UPM) foundation for offering a PICATA postdoctoral fellowship (OP-R). FP is supported by the “DiNaMo” project no. 157660 funded by National Institute of Nuclear Physics. PO is supported by the FIRB “Futuro in Ricerca 2010” project (CUP code: D11J11000450001) funded by MIUR and by the “A.Di.N-Tech.” project (CUP code: D15E13000130003) funded by the University of Torino and “Compagnia di San Paolo”. The MeV ion beam implantations performed at the INFN Legnaro National Laboratories was supported by the “Dia.Fab.” experiment, and those at the INFN LABEC Laboratory by the “FARE” and “CICAS” experiments. NMP is supported by the European Research Council (ERC StG Ideas 2011 BIHSNAM no. 279985, ERC PoC 2013-2 KNOTOUGH no. 632277 and ERC PoC 2015 SILKENE no. 693670), by the European Commission under the Graphene Flagship (“Nanocomposites”, no. 604391). FB acknowledges support from BIHSNAM. LL-M and CO acknowledge the Spanish MINECO through the Severo Ochoa Program (SEV-2015-0496) and MAT2013-47869-C4-1-P. CO acknowledges the specific agreement between ICMAB-CSIC and the Synchrotron Light Facility ALBA