8 research outputs found
Amorphous carbon film deposition on inner surface of tubes using atmospheric pressure pulsed filamentary plasma source
Uniform amorphous carbon film is deposited on the inner surface of quartz
tube having the inner diameter of 6 mm and the outer diameter of 8 mm. A pulsed
filamentary plasma source is used for the deposition. Long plasma filaments (~
140 mm) as a positive discharge are generated inside the tube in argon with
methane admixture. FTIR-ATR, XRD, SEM, LSM and XPS analyses give the conclusion
that deposited film is amorphous composed of non-hydrogenated sp2 carbon and
hydrogenated sp3 carbon. Plasma is characterized using optical emission
spectroscopy, voltage-current measurement, microphotography and numerical
simulation. On the basis of observed plasma parameters, the kinetics of the
film deposition process is discussed