18 research outputs found
Ga^+ beam lithography for nanoscale silicon reactive ion etching
By using a dry etch chemistry which relies on the highly preferential etching of silicon, over that of gallium (Ga), we show resist-free fabrication of precision, high aspect ratio nanostructures and microstructures in silicon using a focused ion beam (FIB) and an inductively coupled plasma reactive ion etcher (ICP-RIE). Silicon etch masks are patterned via Ga^+ ion implantation in a FIB and then anisotropically etched in an ICP-RIE using fluorinated etch chemistries. We determine the critical areal density of the implanted Ga layer in silicon required to achieve a desired etch depth for both a Pseudo Bosch (SF_6/C_4F_8) and cryogenic fluorine (SF_6/O_2) silicon etching. High fidelity nanoscale structures down to 30 nm and high aspect ratio structures of 17:1 are demonstrated. Since etch masks may be patterned on uneven surfaces, we utilize this lithography to create multilayer structures in silicon. The linear selectivity versus implanted Ga density enables grayscale lithography. Limits on the ultimate resolution and selectivity of Ga lithography are also discussed
On the Spectral Behavior and Normalization of a Resonance-Free and High-Frequency Stable Integral Equation
The combined field integral equation (CFIE) used for solving scattering and radiation problems, although a resonance-free formulation, suffers from an ill-conditioning that strongly depends on the frequency and discretization density, both in the low- and high-frequency regime, resulting in slow convergence rates for iterative solvers. This work presents a new preconditioning scheme for the CFIE that cures the low-and the high-frequency as well as the dense discretization breakdown. The new preconditioner for the CFIE is based on a spherical harmonics analysis and the proper regularization with Helmholtz-type operators. Numerical results have been obtained to prove the effectiveness of this new formulation in real scenarios
On the Fast Direct Solution of a Preconditioned Electromagnetic Integral Equation
This work presents a fast direct solver strategy for electromagnetic integral equations in the high-frequency regime. The new scheme relies on a suitably preconditioned combined field formulation and results in a single skeleton form plus identity equation. This is obtained after a regularization of the elliptic spectrum through the extraction of a suitably chosen equivalent circulant problem. The inverse of the system matrix is then obtained by leveraging the Woodbury matrix identity, the low-rank representation of the extracted part of the operator, and fast circulant algebra yielding a scheme with a favorable complexity and suitable for the solution of multiple right-hand sides. Theoretical considerations are accompanied by numerical results both of which are confirming and showing the practical relevance of the newly developed scheme
Malaria in Cambodia : a retrospective analysis of a changing epidemiology 2006-2019
Background: In Cambodia, malaria persists with changing epidemiology and resistance to antimalarials. This study aimed to describe how malaria has evolved spatially from 2006 to 2019 in Cambodia. Methods: We undertook a secondary analysis of existing malaria data from all government healthcare facilities in Cambodia. The epidemiology of malaria was described by sex, age, seasonality, and species. Spatial clusters at the district level were identified with a Poisson model. Results: Overall, incidence decreased from 7.4 cases/1000 population in 2006 to 1.9 in 2019. The decrease has been drastic for females, from 6.7 to 0.6/1000. Adults aged 15-49 years had the highest malaria incidence among all age groups. The proportion of Plasmodium (P.) falciparum + Mixed among confirmed cases declined from 87.9% (n = 67,489) in 2006 to 16.6% (n = 5290) in 2019. Clusters of P. falciparum + Mixed and P. vivax + Mixed were detected in forested provinces along all national borders. Conclusions: There has been a noted decrease in P. falciparum cases in 2019, suggesting that an intensification plan should be maintained. A decline in P. vivax cases was also noted, although less pronounced. Interventions aimed at preventing new infections of P. vivax and relapses should be prioritized. All detected malaria cases should be captured by the national surveillance system to avoid misleading trends
Exploring the determinants of distress health financing in Cambodia
Borrowing is a common coping strategy for households to meet healthcare costs in countries where social health protection is limited or non-existent. Borrowing with interest, hereinafter termed distress health financing or distress financing, can push households into heavy indebtedness and exacerbate the financial consequences of healthcare costs. We investigated distress health financing practices and associated factors among Cambodian households, using primary data from a nationally representative household survey of 5000 households. Multivariate logistic regression was used to determine factors associated with distress health financing. Results showed that 28.1% of households consuming healthcare borrowed to pay for that healthcare with 55% of these subjected to distress financing. The median loan was US200 for loans with interest and US$75 for loans without interest). Approximately 50.6% of healthcare-related loans were to pay for the costs of outpatient care in the past month, 45.8% for inpatient care and 3.6% for preventive care in the past 12 months. While the average period to pay off the loan was 8 months, 78% of households were still indebted from loans taken over 12 months before the survey. Distress financing is strongly associated with household poverty - the poorer the household the more likely it is to borrow, fall into debt and unable to pay off the debt - even for members of the health equity funds, a national scheme designed to improve financial access to health services for the poor. Other determinants of distress financing were household size, use of inpatient care and outpatient consultations with private providers or with both private and public providers. In order to ensure effective financial risk protection, Cambodia should establish a more comprehensive and effective social health protection scheme that provides maximum population coverage and prioritizes services for populations at risk of distress financing, especially poorer and larger households
On the Fast Direct Solution of a Preconditioned Electromagnetic Integral Equation
This work presents a fast direct solver strategy for electromagnetic integral equations in the high-frequency regime. The new scheme relies on a suitably preconditioned combined field formulation and results in a single skeleton form plus identity equation. This is obtained after a regularization of the elliptic spectrum through the extraction of a suitably chosen equivalent circulant problem. The inverse of the system matrix is then obtained by leveraging the Woodbury matrix identity, the low-rank representation of the extracted part of the operator, and fast circulant algebra yielding a scheme with a favorable complexity and suitable for the solution of multiple right-hand sides. Theoretical considerations are accompanied by numerical results both of which are confirming and showing the practical relevance of the newly developed scheme
On the Fast Direct Solution of a Preconditioned Electromagnetic Integral Equation
This work presents a fast direct solver strategy for electromagnetic integral equations in the high-frequency regime. The new scheme relies on a suitably preconditioned combined field formulation and results in a single skeleton form plus identity equation. This is obtained after a regularization of the elliptic spectrum through the extraction of a suitably chosen equivalent circulant problem. The inverse of the system matrix is then obtained by leveraging the Woodbury matrix identity, the low-rank representation of the extracted part of the operator, and fast circulant algebra yielding a scheme with a favorable complexity and suitable for the solution of multiple right-hand sides. Theoretical considerations are accompanied by numerical results both of which are confirming and showing the practical relevance of the newly developed scheme