Spirothiopyran-Based Reversibly Saturable Photoresist

Super-resolution lithography holds the promise of achieving three-dimensional (3D) nanopatterning at deep subwavelength resolutions with high throughput. 3D super-resolution lithography schemes demonstrated thus far have all been serial in nature, primarily due to the lack of a photoresist chemistry that not only couples a saturable reversibly switchable reaction with a writing step but also has a low saturation threshold. Here, we demonstrate that combining the reversible photoisomerization of spirothiopyran with the thiol-Michael conjugate addition reaction achieves the necessary photochemical characteristics. Green light was found to saturate inhibition of the thiol-Michael addition writing step at very low intensity thresholds. By formulating a spirothiopyran-functionalized polyethylene glycol copolymer, we demonstrate spatial control over cross-linking using inhibition by green light. Kinetics measurements combined with photokinetic simulations show that interference lithography on a spirothiopyran maleimide-based writing system using conventional light sources (e.g., a 2 W green laser) should deliver super-resolution features (∼45 nm wide lines) in thick films (tens of microns) over large areas (hundreds of microns on a side). The unique combination of reversible photochromic switching of spirothiopyran with the thiol-Michael addition reaction marks an important step toward realizing a highly parallelized 3D super-resolution writing system

Wetting Regimes for Residual-Layer-Free Transfer Molding at Micro- and Nanoscales

Transfer molding offers a low-cost approach to large-area fabrication of isolated structures in a variety of materials when recessed features of the open-faced mold are filled without leaving a residual layer on the plateaus of the mold. Considering both macroscale dewetting and microscale capillary flow, a proposed map of wetting regimes for blade meniscus coating provides a guide for achieving discontinuous dewetting at maximum throughput. Dependence of meniscus morphology on the azimuthal orientation of the stamp provides insight into the dominant mechanisms for discontinuous dewetting of one-dimensional (1-D) patterns. Critical meniscus velocity is measured and residual-layer-free filling is demonstrated for 1-D patterned soft molds (stamps) with periods ranging from 140 nm to 6 μm. Transfer of isolated lines, and multilayer woodpile structures were achieved through plasma bonding. These results are relevant to other roll-to-roll compatible processes for scalable production of high-resolution structures across large areas

Dynamic Imaging of Colloidal-Crystal Nanostructures at 200 Frames per Second

The dynamic noninvasive imaging of colloidal nanostructures has been precluded by the diffraction-limited resolution of (confocal) light microscopy. Using Fast Stimulated Emission Depletion (STED) microscopy, we demonstrate the ability to resolve the formation of a colloidal crystal (monolayer) from particles of 200 nm size, where the voids in the crystal are as small as 30 nm. With a temporal resolution of 5 ms, we exemplify the technique by visualizing the annealing of potential point defects during the formation of the colloidal crystal