New Calibration Method for Experimental Study of the Nonlinear Behavior of a Bulk Acoustic Wave Resonator Subject to a High-Power Signal

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Optical and Telecom thin films deposited by laser ablation

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Synthèse et optimisation d'un filtre à résonateurs BAW pour une application aux fréquences UMTS

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BAW Pressure Sensor on LiNbO3 Membrane Lapping

In this paper, we have proposed a new concept for pressure and more generally stress sensors exploiting single-crystal based HBAR. After describing the operation principle, the practical feasibility of the sensor has been shown, yielding electrical results allowing a first characterization of such sensor sensitivity. The process flow is generic and allows us to develop different devices such as HBAR or SAW sensors with the freedom of choosing material in function of the design requirements. Although the first reported results can not exploit the high quality resonance of such HBARs, more effort will be performed in the next future to definitely validate the approach and the corresponding stress sensitivity

Filtre BAW à large bande passante en niobate de lithium

Assemblée générale "Interférences d'Ondes", GdR Onde

Large bandpass filter synthesis using shear-wave lithium niobate piezoelectric layers

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Filter Synthesis using Shear Wave Piezoelectric Layer Resonators

International audienceCONTEXT Acoustic waves in elastic solids are used in numerous applications in signal processing, including frequency generation, control and filtering in modern wireless communication systems. With the growing demand for multimedia and mobile applications, the new generations of telecommunication satellites require higher performances, higher functionalities and still stronger cost and size constraints.[1][2][3] In that context, BAW devices have many potentialities for the development of smart RF subsystems. For instance this technology is now used as alternative to Surface Acoustic Waves (SAW) filters in handset duplexers for UMTS and DCS standards around 2 GHz with Aluminum Nitride piezoelectric layers[12]. However, Aluminum Nitride is not suitable for large band applications, due to its electromechanical coupling coefficient. Its relative percentage, which represents the difference between resonant and antiresonant frequencies is 7%. This material is mainly processed for local oscillators or narrowband filtering operations (<5%) [4] [5]. That is why Lithium Niobate layers are studied to reach large band pass specifications for satellites requirements. It is essential to maximize the values of electromechanical coupling coefficient in Lithium Niobate, and to use wisely crystallographic cuts in order to perform the best results for longitudinal or transverse waves coupling larger difference between resonant and antiresonant frequencies. Thanks to Lithium Niobate shear wave propagation behavior, the goal will become synthesizing large bandpass frequency response of simple filters structures