Recrystallized parylene as a mask for silicon chemical etching

This paper presents the first use of recrystallized parylene as masking material for silicon chemical etch. Recrystallized parylene was obtained by melting parylene C at 350°C for 2 hours. The masking ability of recrystallized parylene was tested in HNA (hydrofluoric acid, nitric acid and acetic acid) solution of various ratios, KOH (potassium hydroxide) solution and TMAH (tetramethylammonium hydroxide) at different temperatures and concentrations. It is found that interface between parylene and the substrate can be attacked, which results in undercuts. Otherwise, recrystallized parylene exhibited good adhesion to silicon, complete protection of unexposed silicon and silicon etching rates comparable to literature data

Q-enhanced fold-and-bond MEMS inductors

This work presents a novel coil fabrication technology to enhance quality factor (Q factor) of microfabricated inductors for implanted medical wireless sensing and data/power transfer applications. Using parylene as a flexible thin-film device substrate, a post-microfabrication substrate folding-and-bonding method is developed to effectively increase the metal thickness of the surface-micromachined inductors, resulting in their lower self-resistance so their higher quality factor. One-fold-and-bond coils are successfully demonstrated as an example to verify the feasibility of the fabrication technology with measurement results in good agreements with device simulation. Depending on target specifications, multiple substrate folding-and-bonding can be extensively implemented to facilitate further improved electrical characteristics of the coils from single fabrication batch. Such Q-enhanced inductors can be broadly utilized with great potentials in flexible integrated wireless devices/systems for intraocular prostheses and other biomedical implants

An hourglass model for the flare of HST-1 in M87

To explain the multi-wavelength light curves (from radio to X-ray) of HST-1 in the M87 jet, we propose an hourglass model that is a modified two-zone system of Tavecchio & Ghisellini (hereafter TG08): a slow hourglass-shaped or Laval nozzle-shaped layer connected by two revolving exponential surfaces surrounding a fast spine, through which plasma blobs flow. Based on the conservation of magnetic flux, the magnetic field changes along the axis of the hourglass. We adopt the result of TG08---the high-energy emission from GeV to TeV can be produced through inverse Compton by the two-zone system, and the photons from radio to X-ray are mainly radiated by the fast inner zone system. Here, we only discuss the light curves of the fast inner blob from radio to X-ray. When a compressible blob travels down the axis of the first bulb in the hourglass, because of magnetic flux conservation, its cross section experiences an adiabatic compression process, which results in particle acceleration and the brightening of HST-1. When the blob moves into the second bulb of the hourglass, because of magnetic flux conservation, the dimming of the knot occurs along with an adiabatic expansion of its cross section. A similar broken exponential function could fit the TeV peaks in M87, which may imply a correlation between the TeV flares of M87 and the light curves from radio to X-ray in HST-1. The Very Large Array (VLA) 22 GHz radio light curve of HST-1 verifies our prediction based on the model fit to the main peak of the VLA 15 GHz radio light curve.Comment: 14 pages, 2 figures, accepted for publication in A

The numerical simulation on the regularity of dust dispersion in whole-rock mechanized excavation face with different air-draft amount

AbstractAn experimental investigation was carried out on coal dust-inertant mixture explosions. Tests of explosion severity and flammability limit were conducted by using the Siwek 20 L vessel and influences of ignition energy, coal dust calorific value, coal dust concentration and inertant composition were taken into account. The increase of inerting results with ignition energy is followed by an approximate stabilization when ignition energy exceeds 5kJ. The ignition energy region of 5-10kJ is appropriate for inerting testing, whereas ignitors with energy lower than 5kJ produce unrealistic inerting results. The inerting effectiveness of inertant increases with the reduction of coal dust calorific value. Coal dust concentrations near the stoichiometric concentration require the greatest amount of inertant to suppress explosions. As the coal dust concentration increases beyond the stoichiometric, the amount of inertant requirement is reduced. Due to the efficient decomposition and particular flame extinguishing mechanism, monoammonium phosphate represents more excellent inerting effectiveness than calcium carbonate

Wide-Area Damping Controller of FACTS Devices for Inter-Area Oscillations Considering Communication Time Delays

The usage of remote signals obtained from a wide-area measurement system (WAMS) introduces time delays to a wide-area damping controller (WADC), which would degrade system damping and even cause system instability. The time-delay margin is defined as the maximum time delay under which a closed-loop system can remain stable. In this paper, the delay margin is introduced as an additional performance index for the synthesis of classical WADCs for flexible ac transmission systems (FACTS) devices to damp inter-area oscillations. The proposed approach includes three parts: a geometric measure approach for selecting feedback remote signals, a residue method for designing phase-compensation parameters, and a Lyapunov stability criterion and linear matrix inequalities (LMI) for calculating the delay margin and determining the gain of the WADC based on a tradeoff between damping performance and delay margin. Three case studies are undertaken based on a four-machine two-area power system for demonstrating the design principle of the proposed approach, a New England ten-machine 39-bus power system and a 16-machine 68-bus power system for verifying the feasibility on larger and more complex power systems. The simulation results verify the effectiveness of the proposed approach on providing a balance between the delay margin and the damping performance

Ethyl 2-(4-chloro-2-oxo-2,3-dihydro-1,3-benzothia­zol-3-yl)acetate

In the mol­ecule of the title compound, C11H10ClNO3S, the benzene and thia­zole rings are oriented at a dihedral angle of 1.25 (3)°. Intra­molecular C—H⋯O and C—H⋯Cl inter­actions result in the formation of two five-membered rings which both adopt envelope conformations