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    3 research outputs found

    Defect Mitigation in Area-Selective Atomic Layer Deposition of Ruthenium on Titanium Nitride/Dielectric Nanopatterns

    Author
    Publication venue
    'Wiley'
    Publication date
    Field of study
    No full text
    status: publishe
    Lirias

    Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper

    Author
    Publication venue
    'American Chemical Society (ACS)'
    Publication date
    Field of study
    No full text
    Crossref
    Online Research Database In Technology

    Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper

    Author
    Publication venue
    'American Chemical Society (ACS)'
    Publication date
    Field of study
    No full text
    Crossref
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