6 research outputs found
\PZT\ Actuated \MEMS\ Membrane Characterization and Post Simulation for Digital Loudspeaker Array Application
International audienceA Digital Loudspeaker Array (DLA) is an electro-mechanical transductor which receives a numerical signal as input data and allows the analogical conversion directly in the air. We designed \PZT\ actuated membranes in order to obtain the highest acoustic pressure as possible. We built 256-MEMS-membranes \DLAs\ using a generic \PZT\ technology and digital acoustic reconstructions of the sound have been already demonstrated using our MEMS-DLA. In this paper, using \FEM\ simulations, we evidence that residual stresses are responsible of the high distortion level measured on our demonstrators. A stress compensated technology was established using \FEM\ approach. Acoustic characterization of stress compensated demonstrators proves distortion decreased and validates our hypothesis
A 256 MEMS membrane digital loudspeaker array based on PZT actuators
International audienceThis paper reports on the development of a unique Digital Loudspeaker Array solution, based on Pb(Zr 0.52 ,Ti 0.48)O 3 (PZT) thin-film actuated membranes, arranged in a matrix and which operate in a binary manner by emitting short pulses of sound pressure. Using the principle of additivity of pressures in the air, it is possible to reconstruct audible sounds. For the first time, electromechanical and acoustic characterizations were reported on 256 MEMS membranes DLA. Sounds audible as far as several meters from the loudspeaker have been generated using low-voltage
Low voltage MEMS digital loudspeaker array based on thin-film PZT actuators
International audienceThis paper reports on the development of a Digital Loudspeaker Array (DLA) solution based on Pb(Zr 0.52 ,Ti 0.48)O 3 (PZT) thin-film actuated membranes. These membranes called speaklets are arranged in a matrix and operate in a binary manner by emitting short pulses of sound pressure. Using the principle of additivity of pressures in the air, it is possible to reconstruct audible sounds. For the first time, electromechanical and acoustic characterizations are reported on a 256-MEMS-membranes DLA. Sounds audible as far as several meters from the loudspeaker have been generated using low voltage (8V)