1 research outputs found
UTA versus line emission for EUVL: Studies on xenon emission at the NIST EBIT
Spectra from xenon ions have been recorded at the NIST EBIT and the emission
into a 2% bandwidth at 13.5 nm arising from 4d-5p transitions compared with
that from 4d-4f and 4p-4d transitions in Xe XI and also with that obtained from
the unresolved transition array (UTA) observed to peak just below 11 nm. It was
found that an improvement of a factor of five could be gained in photon yield
using the UTA rather than the 4d-5p emission. The results are compared with
atomic structure calculations and imply that a significant gain in efficiency
should be obtained using tin, in which the emission at 13.5 nm comes from a
similar UTA, rather than xenon as an EUVL source material