FAUNA BURUANA. Der erste Stenus (LATR.) von den Molukken (Col. Staph.)

abstract not availabl

Ostpal\ue4arktische Steninen (Col. Staph)

Volume: 30Start Page: 559End Page: 57

XXXI. — The Subfamily Steninae, as represented in Northern Sarawak

Volume: 3Start Page: 453End Page: 46

Large Area TOPCon Technology Achieving 23.4% Efficiency

We report on the development of the TOPCon technology on large area focusing on the deposition technology for the a-SiC x (n) layer and the rear side metallization. We demonstrate that kHz direct-plasma technology can be used to deposit the a-SiC x (n) layers and that concerns about ion bombardment damaging the thin SiO x are not justified. Excellent surface passivation quality was achieved with lifetimes up to 13 ms (1 Ωcm n-type). The layers can be contacted using ITO reaching specific contact resistivities in the range of 5 mΩcm 2 . Solar cells with a boron diffused emitter and TOPCon rear are presented resulting in an efficiency of 23.4 % with laser contact opening and NiCuAg plating