Performance Enhancement of ZnO UV Photodetectors by Surface Plasmons

Surface plasmons, a unique property of metal nanoparticles, have been widely applied to enhance the performance of optical and electrical devices. In this study, a high quality zinc oxide (ZnO) thin film was grown on a quartz substrate by a radio frequency magnetron sputtering technique, and a metal–semiconductor–metal structured ultraviolet detector was prepared on the ZnO film. The responsivity of the photodetector was enhanced from 0.836 to 1.306 A/W by sputtering metal (Pt) nanoparticles on the surface of the device. In addition, the absorption of the ZnO thin film was enhanced partly in the ultraviolet band. It is revealed that Pt nanoparticles play a key role in enhancing the performance of the photodetectors, where surface plasma resonance occurs