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13 research outputs found
Annealing of thin B/Nb2N bilayers, B/Nb bilayers and Nb/B/Nb trilayers via rapid thermal processing (RTP)
Author
Bock W.
Kolbesen B. O.
Lommel B.
Mertens R.
Publication venue
'Springer Science and Business Media LLC'
Publication date
01/01/2008
Field of study
No full text
GSI Repository
Analytical Techniques for Semiconductor Materials and Process Characterization 6 (ALTECH 09)
Author
B. O. Kolbesen
C. Claeys
+4 more
D. Giubertoni
G. Pepponi
L. Fabry
M. Bersani
Publication venue
The Electrochemical Society
Publication date
Field of study
No full text
Archivio della ricerca - Fondazione Bruno Kessler
The formation of β-FeSi2 precipitates in microcrystalline Si
Author
A. G. Birdwell
B. L. Sharma
+14 more
B. O. Kolbesen
D. Leong
E. I. Terukov
G. N. Mosina
K. Lefki
K. Lefki
M. C. Bost
N. A. Drozdov
O. B. Gusev
O. I. Kon’kov
R. I. Batalov
R. I. Batalov
V. Kh. Kudoyarova
V. Yu. Davydov
Publication venue
'Pleiades Publishing Ltd'
Publication date
Field of study
No full text
Crossref
Formation and nature of swirl defects in silicon
Author
A. J. R. Kock de
A. Sceger
+28 more
A. Seeger
A. Seeger
B. O. Kolbesen
B. O. Kolbesen
C. J. Varker
D. J. Mazey
D. M. Maher
E. Kröner
E. Sirtl
F. Kroupa
F. Vieweg-Gutberlet
G. R. Booker
G. W. Groves
H. Föll
H. Föll
H. Neubrand
J. A. Sigler
J. Chikawa
K. V. Ravi
L. I. Bernewitz
L. I. Bernewitz
O. G. Bacon
P. B. Hirsch
P. M. Kelly
R. Ogden
S. M. Hu
T. Nozaki
T. S. Plaskett
Publication venue
'Springer Science and Business Media LLC'
Publication date
Field of study
No full text
Crossref
Annealing of thin B/Nb2N bilayers, B/Nb bilayers and Nb/B/Nb trilayers via rapid thermal processing (RTP)
Author
A Berendes
A Berendes
+25 more
A Guinier
A Kaloyeros
A Weimer
B. Lommel
B. O. Kolbesen
BJ Aylett
C Angelkort
C Angelkort
C Mitterer
CW Magee
FJ DiSalvo
H Gnaser
KH Min
MA Ray
NE Brese
O Brunkahl
O Brunkahl
R Ditchfeld
R Mertens
R. Mertens
ST Oyama
VA Matylitskaya
VA Matylitskaya
W. Bock
Y Gao
Publication venue
'Springer Science and Business Media LLC'
Publication date
Field of study
No full text
Crossref
Spectroscopic parameters of the absorption bands related to the local vibrational modes of carbon and oxygen impurities in silicon enriched with 28Si, 29Si, and 30Si isotopes
Author
A. D. Bulanov
A. G. Kurganov
+22 more
A. Sassella
B. A. Andreev
B. O. Kolbesen
B. Pajot
B. Pajot
D. R. Bosomworth
D. Schiel
G. G. Devyatykh
H. -J. Pohl
H. Niemann
K. M. Itoh
L. I. Khirunenko
M. Cardona
O. DeGryse
P. Becker
P. G. Sennikov
P. Wagner
P. Wagner
R. C. Newman
T. Ruf
T. V. Kotereva
V. V. Emtsev
Publication venue
'Pleiades Publishing Ltd'
Publication date
Field of study
No full text
Crossref
Oberflächen- und Dünnschichtanalyse in der Silizium-Technologie: aktuelle und zukünftige Probleme und Anforderungen
Author
B. O. Kolbesen
BO Johansson
+33 more
BO Kolbesen
CW Magee
D Briggs
D Widmann
DL Flamm
G Beamson
GS Oehrlein
H Schaber
H Schwenke
H Uchida
HJ Böhm
HM Mühlhoff
J Krizek
JE Sundgren
K Yates
KH Küsters
KY Ahn
L Mühlhoff
M Engelhardt
M Wittmer
MA Nicolet
MF Ebel
MP Seah
N Cheung
R Criegern von
R Kakoschke
RL Chaney
SW Gaarenstroom
T Tanigaki
TW Carr
W Beinvogl
W Hösler
W. Pamler
Publication venue
'Springer Science and Business Media LLC'
Publication date
Field of study
No full text
Crossref
X-ray and luminescent analysis of finely dispersed β-FeSi2 films formed in Si by pulsed ion-beam treatment
Author
A. Reittinger
B. O. Kolbesen
+20 more
C. Spinella
E. I. Terukov
G. Franzo
H. Katsumata
K. J. Reeson
K. Oyoshi
K. P. Homewood
L. J. Chen
M. Ferrari
M. G. Grimaldi
N. A. Drozdov
R. Hodgson
R. I. Batalov
R. M. Bayazitov
R. M. Bayazitov
R. M. Bayazitov
R. M. Bayazitov
T. Suemasu
V. Kh. Kudoyarova
W. Fuhs
Publication venue
'Pleiades Publishing Ltd'
Publication date
Field of study
No full text
Crossref
A pulsed synthesis of β-FeSi2 layers on silicon implanted with Fe+ ions
Author
. R. Hodgson
A. G. Birdwell
+30 more
B. O. Kolbesen
E. I. Terukov
F. Urbach
G. Weiser
H. Ennen
H. Ennen
H. Katsumata
H. Kuehne
J. Pankove
K. J. Reeson
K. Lefki
K. Oyoshi
K. P. Homewood
L. J. Chen
M. C. Bost
M. Ferrari
M. G. Grimaldi
N. A. Drozdov
R. I. Batalov
R. M. Bayazitov
R. M. Bayazitov
R. M. Bayazitov
S. Coffa
T. Suemasu
T. Suemasu
V. Daraktchieva
V. Kh. Kudoyarova
Y. Maeda
Z. Yang
Z. Yang
Publication venue
'Pleiades Publishing Ltd'
Publication date
Field of study
No full text
Crossref
Neutron activation analysis for reference determination of the implantation dose of cobalt ions
Author
Bennlnghoven A.
Bottger M. L.
+62 more
Boudewljn P. R.
Bubert H.
Bubert H.
Chang C.
Cornells R.
Currie L. A.
Dams R.
Davies J. A.
De Corte F.
De Soete D.
Dunselman C. P. M.
Ehmann W.
Erdtmann G.
Erdtmann G.
Erdtmann G.
Fanger H.-U.
Fleming R. F.
Fleming R. F.
Garten R. P. H.
Grasserbauer M.
Greenberg R. R.
Grleplnk B.
Haas E. W.
Henning. Bubert
Heydorn K.
Holnkls O.
Homma Y.
Hues S. M.
James W. D.
Janlcki C.
Klockenkámper R.
Klockenkámper R.
Kohlhof K.
Kolbesen B. O.
Leopold. Palmetshofer
Mandel
Mlzuike A.
Morrison G
Murarka S. P.
Pepelnlk R.
Powell C.
Powell C. J.
Rainer P. H. Garten
Sanchez F. H.
Seelmann-Eggebert W.
Segebade C.
Seáh P.
Slmonlts A.
Smith G. C.
Tschopel P.
v. Crlegern R.
Van Ommen A. H.
Vandecasteele C.
Verheljke M. L.
Verheljke M. L.
Werner H. W.
Werner H. W.
Werner H. W.
Werner H. W.
White A.
Wu M. F.
Yoshlhara K.
Publication venue
'American Chemical Society (ACS)'
Publication date
Field of study
No full text
Crossref
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