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The Influence of Thickness of the Layers on Structural-Phase and Strained State of Multiperiod Nanolayer Ti/TiN Coatings
The influence of condition of vacuum-arc multi-layer TiN/Ti coatings on their phase composition, structure,
stress state and mechanical properties has been studied. The regularities of the phase composition,
structural state of stress, hardness with dependence on the magnitude of the negative bias applied to the
substrate during the deposition and the thickness of the Ti and TiN layers in a multilayer coating were obtained.
The analysis of the causes of observed changes, based on the mechanism of formation of surface
layers of vacuum-arc coatings in the condition of implantation processes stimulated by applying a negative
bias to the substrate was held.
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