The Influence of Thickness of the Layers on Structural-Phase and Strained State of Multiperiod Nanolayer Ti/TiN Coatings

The influence of condition of vacuum-arc multi-layer TiN/Ti coatings on their phase composition, structure, stress state and mechanical properties has been studied. The regularities of the phase composition, structural state of stress, hardness with dependence on the magnitude of the negative bias applied to the substrate during the deposition and the thickness of the Ti and TiN layers in a multilayer coating were obtained. The analysis of the causes of observed changes, based on the mechanism of formation of surface layers of vacuum-arc coatings in the condition of implantation processes stimulated by applying a negative bias to the substrate was held. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/3481