Wafer-Scale Fabrication of Plasmonic Crystals from Patterned Silicon Templates Prepared by Nanosphere Lithography

By combining nanosphere lithography with template stripping, silicon wafers were patterned with hexagonal arrays of nanowells or pillars. These silicon masters were then replicated in gold by metal evaporation, resulting in wafer-scale hexagonal gratings for plasmonic applications. In the nanosphere lithography step, two-dimensional colloidal crystals of 510 nm diameter polystyrene spheres were assembled at the air–water interface and transferred to silicon wafers. The spheres were etched in oxygen plasma in order to define their size for masking of the silicon wafer. For fabrication of metallic nanopillar arrays, an alumina film was grown over the nanosphere layer and the spheres were then removed by bath sonication. The well pattern was defined in the silicon wafer by reactive ion etching in a chlorine plasma. For fabrication of metal nanowell arrays, the nanosphere monolayer was used directly as a mask and exposed areas of the silicon wafer were plasma-etched anisotropically in SF₆/Ar. Both techniques could be used to produce subwavelength metal replica structures with controlled pillar or well diameter, depth, and profile, on the wafer scale, without the use of direct writing techniques to fabricate masks or masters

Broadband Light Absorption with Multiple Surface Plasmon Polariton Waves Excited at the Interface of a Metallic Grating and Photonic Crystal

Light incident upon a periodically corrugated metal/dielectric interface can generate surface plasmon polariton (SPP) waves. This effect is used in many sensing applications. Similar metallodielectric nanostructures are used for light trapping in solar cells, but the gains are modest because SPP waves can be excited only at specific angles and with one linear polarization state of incident light. Here we report the optical absorptance of a metallic grating coupled to silicon oxide/oxynitride layers with a periodically varying refractive index, <i>i</i>.<i>e</i>., a 1D photonic crystal. These structures show a dramatic enhancement relative to those employing a homogeneous dielectric material. Multiple SPP waves can be activated, and both s<i>-</i> and p<i>-</i>polarized incident light can be efficiently trapped. Many SPP modes are weakly bound and display field enhancements that extend throughout the dielectric layers. These modes have significantly longer propagation lengths than the single SPP modes excited at the interface of a metallic grating and a uniform dielectric. These results suggest that metallic gratings coupled to photonic crystals could have utility for light trapping in photovoltaics, sensing, and other applications