Novel fabrication method for three-dimensional nanostructuring: an application to micro-optics

We propose a 3D micro and nanofabrication method with potential applications to several nanotechnology-related fields. Our approach is based on the combination of lithographic steps and isotropic wet etchings performed on a quartz or glass substrate to form 3D structures with very accurate shape control and nanometer scale surface roughness. The resulting concavities at the quartz surface are converted into convex plastic elements by hot embossing or casting techniques. Complex all-polymer refractive optical elements have been realized by this method. Upon illumination, such micro-optics focus the light into predetermined 3D distributions of focal lines and spots. The general fabrication scheme explored here is illustrated through a series of examples in optics, but is expected to offer new solutions to other fields such as medicine, microfluidics and nano-optics

A new fabrication technique for complex refractive micro-optical systems

We present a new method that allows to fabricate structures with tightly controlled three-dimensional profiles in the 10 nm to 100 µm scale range. This consists of a sequence of lithographic steps such as Electron Beam (EB) or Focused Ion Beam (FIB) lithography, alternated with isotropic wet etching processes performed on a quartz substrate. Morphological characterization by SEM and AFM shows that 3D structures with very accurate shape control and nanometer scale surface roughness can be realized. Quartz templates have been employed as complex system of micromirrors after metal coating of the patterned surface or used as stamps in nanoimprint, hot embossing or casting processes to shape complex plastic elements. Compared to other 3D micro and nanostructuring methods, in which a hard material is directly "sculptured" by energetic beams, our technique requires a much less intensive use of expensive lithographic equipments, for comparable volumes of structured material, resulting in dramatic increase of throughput. Refractive micro-optical elements have been fabricated and characterized in transmission and reflection modes with white and monochromatic light. The elements produce a distribution of sharp focal spots and lines in the three dimensional space, opening the route for applications of image reconstruction based on refractive optics

Morphologic, structural, and optical characterization of sol-gel derived TiO2 thin films for memristive devices

Sol-gel derived TiO2 thin films were prepared by spin- coating from an alcoholic solution of titanium isopropoxide. With the aim to develop titania layers suitable for memristive devices, the films were deposited onto test structures based on fused silica quartz substrates patterned with a Ti (5nm)/Pt (50nm) layer. The reported fabrication protocol is suitable for the development of a memristive device. Optical, structural, and morphological features of the samples were investigated with complementary techniques, such as scanning electron microscopy (SEM), prism coupling m-line and micro-Raman spectroscopy as well as transmittance and profilometry measurements. The quality of the surface of the obtained films was evaluated by SEM technique, and the morphology of samples deposited with different fabrication protocols was investigated. Additionally, a computer code for the refractive index and thickness estimation from the transmittance spectra was developed by unconstrained optimization procedure. The results of simulation were in good agreement with the experimental data obtained by m-line measurements. Moreover, the porosity of a specific set of test unannealed films has been estimated. TiO2 films exhibit thickness of tens of nm, and micro-Raman spectroscopy in conjunction with SEM indicate the presence of anatase phase after thermal annealing at 400 °C. (© 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotropic wet etching

The excellent characteristics that nanoimprint lithography (NIL) shows as a two-dimensional patterning technique, such as resolution and throughput, are shared with its three-dimensional (3D) structuring version. Nevertheless, the potentialities of NIL for 3D structuring remain largely unexplored and unexploited, hindered by the difficulties in the fabrication of high quality masters with throughput suitable for practical purposes. We present a technique that allows production of stamps with tightly controlled three-dimensional profiles in the 10 nm–100 μm scale range. This technique consists of a sequence of lithographic steps alternated with isotropic wet etching processes performed on a quartz substrate. Scanning electron microscopy and atomic force microscopy characterization shows that 3D structures with very accurate shape control and nanometer scale surface roughness can be formed with this method. Quartz stamps have been employed in nanoimprint, hot embossing, or casting processes to shape complex plastic elements. This technique is expected to have many applications in different nanotechnology-related fields such as optics, nanomechanics, microfluidics, and plasmon nano-optics

Wave front engineering by means of diffractive optical elements for applications in microscopy

We present a unified view regarding the use of diffractive optical elements (DOEs) for microscopy applications a wide range of electromagnetic spectrum. The unified treatment is realized through the design and fabrication of DOE through which wave front beam shaping is obtained. In particular we show applications ranging from micromanipulation using optical tweezers to X-ray differential interference contrast (DIC) microscopy. We report some details on the design and physical implementation of diffractive elements that beside focusing perform also other optical functions: beam splitting, beam intensity and phase redistribution or mode conversion. Laser beam splitting is used for multiple trapping and independent manipulation of spherical micro beads and for direct trapping and manipulation of biological cells with non-spherical shapes. Another application is the Gauss to Laguerre-Gaussian mode conversion, which allows to trap and transfer orbital angular momentum of light to micro particles with high refractive index and to trap and manipulate low index particles. These experiments are performed in an inverted optical microscope coupled with an infrared laser beam and a spatial light modulator for DOEs implementation. High resolution optics, fabricated by means of e-beam lithography, are demonstrated to control the intensity and the phase of the sheared beams in X-ray DIC microscopy. DIC experiments with phase objects reveal a dramatic increase in image contrast compared to bright-field X-ray microscopy

Sol–Gel Photonic Glasses: From Material to Application

In this review, we present a short overview of the development of sol–gel glasses for application in the field of photonics, with a focus on some of the most interesting results obtained by our group and collaborators in that area. Our main attention is devoted to silicate glasses of different compositions, which are characterized by specific optical and spectroscopic properties for various applications, ranging from luminescent systems to light-confining structures and memristors. In particular, the roles of rare-earth doping, matrix composition, the densification process and the fabrication protocol on the structural, optical and spectroscopic properties of the developed photonic systems are discussed through appropriate examples. Some achievements in the fabrication of oxide sol–gel optical waveguides and of micro- and nanostructures for the confinement of light are also briefly discussed

Optical trapping and micromanipulation in microchannels with various configurations

Trapping and manipulation of microparticles using optical tweezers is usually performed within a sample cell formed by two parallel microscope cover slides. In this paper we discuss and demonstrate trapping and manipulation conditions when the cell has more complex configurations like microchannels or capillary tubes. The microchannels are fabricated on the surface of the cover slide by means of lithographic techniques. Experimental results of trapping and micromanipulation for silica microspheres and biological samples immersed in water show the usefulness of our study for microfluidics and biological applications

A new fabrication technique for complex refractive micro-optical systems

We present a new method that allows to fabricate structures with tightly controlled three-dimensional profiles in the 10 nm to 100 µm scale range. This consists of a sequence of lithographic steps such as Electron Beam (EB) or Focused Ion Beam (FIB) lithography, alternated with isotropic wet etching processes performed on a quartz substrate. Morphological characterization by SEM and AFM shows that 3D structures with very accurate shape control and nanometer scale surface roughness can be realized. Quartz templates have been employed as complex system of micromirrors after metal coating of the patterned surface or used as stamps in nanoimprint, hot embossing or casting processes to shape complex plastic elements. Compared to other 3D micro and nanostructuring methods, in which a hard material is directly sculptured by energetic beams, our technique requires a much less intensive use of expensive lithographic equipments, for comparable volumes of structured material, resulting in dramatic increase of throughput. Refractive micro-optical elements have been fabricated and characterized in transmission and reflection modes with white and monochromatic light. The elements produce a distribution of sharp focal spots and lines in the three dimensional space, opening the route for applications of image reconstruction based on refractive optics.</p

Optical micromanipulation of microscopic particles using axicon tipped fiber

Trapping and manipulation of microscopic objects using fiber optical traps is gaining considerable interest, as these objects can be manipulated inside complex environments, thus removing the limitation of short working distance of the conventional optical tweezers. We show that an axicon like structure built on the tip of a single mode optical fiber produces a focused beam shape with a central hole, implying a very small fraction of the power traveling with rays nearly parallels to the optical axis. Interesting transportation behavior of polystyrene particles using the scattering forces from such an axicon tip fiber was observed. As the distance of the particle from the fiber tip increased, since almost no rays interact with the particle, the scattering forces decreased substantially. Therefore, velocity of the particle at different distances was found to depend much more critically on the particle size in contrast to the beam generated by the bare fiber. While the speed of transport could be increased linearly by increasing the laser power in both axicon tipped fiber and bare fiber, increased speed was observed for particles of larger sizes for both the fiber types. However, the fractional increase in speed for increased size of particles was found to be quite large for axicon tipped fiber as compared to the bare fiber. Use of the observed differences in speed of transportation of microscopic objects could be used to sort them based upon their size