7 research outputs found
STEM-EELS investigations of Ultra-Low-k dielectrics after chemical mechanical polishing: impact on energy band gap
International audienc
HAAF and EELS study of ULK dielectrics: Impact of CMP on microstructure and electronic properties
International audienc
Impact of patterning and ashing on electrical properties and reliability of interconnects in a porous SiOCH ultra low-k dielectric materials
International audienc
First evidence of dielectric loss effects with ultra low-k materials and impact on interconnect propagation performance
International audienc
Side wall restoration of porous ultra low k dielectrics for sub-45 nm technology nodes
International audienc