Random electric fields and impurity diffusion in δ layers

Impurity diffusion in the d layer during the process of its growth has been considered. Experiments show that the spreading of the impurity profile has a complex dependence on the in-plane impurity concentration. We carried out the numerical simulation of the self-consistent diffusion problem for the impurities moving in their own random electric field and have shown that at some critical impurity concentration in d layer the impurity distribution function perpendicular to the layer acquires a non-Gaussian character