Synthesis of high-refractive index sulfur containing polymers for 193-nm immersion lithography: A progress report

To be able to extend the 193 nm immersion lithography technology platform, the development of high refractive index immersion fluids and resists is required. This paper reports our investigations into generating high refractive index polymers for use in photoresist formulations for 193 nm immersion lithograph. In this study a series of model compounds have been screened for refractive index and transparency at 589 nm and 193 nm. For the compounds studied this series of experiments demonstrated that sulfur-containing compounds have a positive effect on the refractive index of a molecule at 589 nm. However, the situation is complicated by the presence of absorption bands for some small molecules in the low waveleingth region. To demonstrate this, we examined the refractive index dispersion of a series of molecules based on ethyl acetate with varying degrees of sulfur substitution. These results indicated that an anomalous increase in refractive index could be expected 20 - 30 nm above the absorption maximum. The implications for design of high refractive index resists for 193 nm immersion lithography are discussed

Fall Detection with Unobtrusive Infrared Array Sensors

As the world’s aging population grows, fall is becoming a major problem in public health. It is one of the most vital risks to the elderly. Many technology based fall detection systems have been developed in recent years with hardware ranging from wearable devices to ambience sensors and video cameras. Several machine learning based fall detection classifiers have been developed to process sensor data with various degrees of success. In this paper, we present a fall detection system using infrared array sensors with several deep learning methods, including long-short-term-memory and gated recurrent unit models. Evaluated with fall data collected in two different sets of configurations, we show that our approach gives significant improvement over existing works using the same infrared array sensor

Controlled release of ketorolac through nanocomposite films of hydrogel and LDH-nanoparticles

A novel nanocomposite film for sustained release of anionic ophthalmic drugs through a double-control process has been examined in this study. The film, made as a drug-loaded contact lens, consists principally of a polymer hydrogel of 2-hydroxyethyl methacrylate (HEMA), in whose matrix MgAl-layered double hydroxide (MgAl-LDH) nanoparticles intercalated with the anionic drug are well dispersed. Such nanocomposite films (hydrogel-LDH-drug) contained 0.6-0.8 mg of MgAl-LDH and 0.08-0.09 mg of the ophthalmic drug (ketorolac) in 1.0 g of hydrogel. MgAl-drug-LDH nanoparticles were prepared with the hydrodynamic particle size of 40-200 nm. TEM images show that these nanoparticles are evenly dispersed in the hydrogel matrix. In vitro release tests of hydrogel-LDH-drug in pH 7.4 PBS solution at 32 A degrees C indicate a sustained release profile of the loaded drug for 1 week. The drug release undergoes a rapid initial burst and then a monotonically decreasing rate up to 168 h. The initial burst release is determined by the film thickness and the polymerization conditions, but the following release rate is very similar, with the effective diffusion coefficient being nearly constant (3.0 x 10(-12) m(2)/s). The drug release from the films is mechanistically attributed to anionic exchange and the subsequent diffusion in the hydrogel matrix